Characteristic of a magnetic suspension type turbo molecular pump of high flow rate.
1987 ◽
Vol 5
(5)
◽
pp. 2965-2967
◽
1992 ◽
Vol 96
(3)
◽
pp. 1228-1233
◽
2021 ◽
Keyword(s):
2017 ◽
Vol 18
(3)
◽
pp. 188-195
◽
2017 ◽
Vol 51
(19)
◽
pp. 11224-11234
◽
Keyword(s):
2012 ◽
Vol 2012
(0)
◽
pp. 147-148