The pumping character of the magnetic suspension‐type turbomolecular pump of high flow rate
1987 ◽
Vol 5
(5)
◽
pp. 2965-2967
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1992 ◽
Vol 96
(3)
◽
pp. 1228-1233
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2021 ◽
Keyword(s):
2017 ◽
Vol 18
(3)
◽
pp. 188-195
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2017 ◽
Vol 51
(19)
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pp. 11224-11234
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Keyword(s):
2012 ◽
Vol 2012
(0)
◽
pp. 147-148