DIN EN ISO 25178-607:2017-06, Geometrische Produktspezifikation_(GPS)_- Oberflächenbeschaffenheit: Flächenhaft_- Teil_607: Merkmale von berührungslos messenden Geräten (konfokale Mikroskopie) (ISO/DIS_25178-607:2017); Deutsche und Englische Fassung prEN_ISO_25178-607:2017

The article presents the determination of the topographic spatial resolution of an optical point sensor. It is quantified by the lateral period limit DLIM measured on a type ASG material measure, also called (topographic) Siemens star, with a confocal sensor following both a radial measurement and evaluation, as proposed by ISO 25178-70, and the measurement and subsequent evaluation of two line scans, proposed by the NPL Good Practice Guide. As will be shown, for the latter, an only slightly misidentified target centre of the Siemens star leads to quite significant errors of the determined DLIM. Remarkably, a misidentified target centre does not necessarily result in an overestimation of DLIM, but lower values might also be obtained. Therefore, a modified Good Practice Guide is proposed to determine DLIM more accurately, as it includes a thorough determination of the centre of the Siemens star as well. While the measurement and evaluation effort is increased slightly compared to the NPL Good Practice Guide, it is still much faster than a complete radial measurement and evaluation.

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Konfokale Mikroskopie in Weiß

10.1007/978-3-662-49359-5 ◽

2016 ◽

Cited By ~ 1

Author(s):

Rolf Theodor Borlinghaus

Keyword(s):

Konfokale Mikroskopie

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Modeling the systematic behavior at the micro and nano length scales

Surface Topography Metrology and Properties ◽

10.1088/2051-672x/ac4ba7 ◽

2022 ◽

Author(s):

Danilo Quagliotti

Keyword(s):

Case Studies ◽

Influence Factors ◽

Repeated Measurements ◽

Length Scales ◽

Frequentist Statistics ◽

Systematic Behavior ◽

Contact Instrument ◽

Model Equations ◽

Definition Of ◽

Iso 25178

Abstract The assessment of the systematic behavior based on frequentist statistics was analyzed in the context of micro/nano metrology. The proposed method is in agreement with the well-known GUM recommendations. The investigation assessed three different case studies with definition of model equations and establishment of the traceability. The systematic behavior was modeled in Sq roughness parameters and step height measurements obtained from different types of optical microscopes, and in comparison with a calibrated contact instrument. The sequence of case studies demonstrated the applicability of the method to micrographs when their elements are averaged. Moreover, a number of influence factors, which are typical causes of inaccuracy at the micro and nano length scales, were analyzed in relation to the correction of the systematic behavior, viz. the amount of repeated measurements, the time sequence of the acquired micrographs and the instrument-operator chain. The possibility of applying the method individually to the elements of the micrographs was instead proven not convenient and too onerous for the industry. Eventually, the method was also examined against the framework of the metrological characteristics defined in ISO 25178-600 with hints on possible future developments.

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Description of the Pumping Rate of Shaft Counterfaces in the Sealing System Radial Lip Seal Using the 3D Parameters of ISO 25178

Tribology Online ◽

10.2474/trol.11.69 ◽

2016 ◽

Vol 11 (2) ◽

pp. 69-74

Author(s):

Cornelius Fehrenbacher ◽

Lothar Hoerl ◽

Frank Bauer ◽

Werner Haas

Keyword(s):

Pumping Rate ◽

Lip Seal ◽

Iso 25178

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