scholarly journals Double hollow cathode metal ion source.

1990 ◽  
Vol 2 (1) ◽  
pp. 56-59
Author(s):  
Hirokazu Taguchi ◽  
Ken-ichiro Nose ◽  
Akira Tonegawa ◽  
Kazuo Takayama
2008 ◽  
Vol 79 (2) ◽  
pp. 02B315 ◽  
Author(s):  
W. J. Zhao ◽  
M. W. O. Müller ◽  
J. Janik ◽  
K. X. Liu ◽  
X. T. Ren

1980 ◽  
Vol 16 (8) ◽  
pp. 820-834 ◽  
Author(s):  
D. Gerstenberger ◽  
R. Solanki ◽  
G. Collins

1995 ◽  
Vol 1 (3) ◽  
pp. 805-810 ◽  
Author(s):  
R.C. Tobin ◽  
K.A. Peard ◽  
G.H. Bode ◽  
K. Rozsa ◽  
Z. Donko ◽  
...  

Author(s):  
R.C. Tobin ◽  
K.A. Peard ◽  
G. Bode ◽  
K. Rozsa ◽  
Z. Donko ◽  
...  

Author(s):  
R. Levi-Setti ◽  
J. M. Chabala ◽  
Y. L. Wang

We have shown the feasibility of 20 nm lateral resolution in both topographic and elemental imaging using probes of this size from a liquid metal ion source (LMIS) scanning ion microprobe (SIM). This performance, which approaches the intrinsic resolution limits of secondary ion mass spectrometry (SIMS), was attained by limiting the size of the beam defining aperture (5μm) to subtend a semiangle at the source of 0.16 mr. The ensuing probe current, in our chromatic-aberration limited optical system, was 1.6 pA with Ga+ or In+ sources. Although unique applications of such low current probes have been demonstrated,) the stringent alignment requirements which they imposed made their routine use impractical. For instance, the occasional tendency of the LMIS to shift its emission pattern caused severe misalignment problems.


1989 ◽  
Vol 50 (C8) ◽  
pp. C8-175-C8-177 ◽  
Author(s):  
N. M. MISKOVSKY ◽  
J. HE ◽  
P. H. CUTLER ◽  
M. CHUNG
Keyword(s):  

2016 ◽  
Vol 87 (2) ◽  
pp. 02A913
Author(s):  
M. J. Segal ◽  
R. A. Bark ◽  
R. Thomae ◽  
E. E. Donets ◽  
E. D. Donets ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document