scholarly journals Laser-Assisted Wet Etching of Silicon Back Surfaces Using 1552 nm Femtosecond Laser

2020 ◽  
Vol 25 (0) ◽  
pp. 7
Author(s):  
Khanh Phu Luong ◽  
Rie Tanabe-Yamagishi ◽  
Noboru Yamada ◽  
Yoshiro Ito
Keyword(s):  
Femtosecond Laser ◽  
Wet Etching

scholarly journals A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding

Micromachines ◽  
2020 ◽  
Vol 11 (2) ◽  
pp. 213 ◽  
Author(s):  
Jia Qi ◽  
Wenbo Li ◽  
Wei Chu ◽  
Jianping Yu ◽  
Miao Wu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Fused Silica ◽  
Wet Etching ◽  
Mixing Efficiency ◽  
Cross Sectional ◽  
Microfluidic Mixer ◽  
Silica Substrate ◽  
Femtosecond Laser Micromachining ◽  
Bonding Method

We demonstrate a microfluidic mixer of high mixing efficiency in fused silica substrate using femtosecond laser-induced wet etching and hydroxide-catalysis bonding method. The micromixer has a three-dimensional geometry, enabling efficient mixing based on Baker’s transformation principle. The cross-sectional area of the fabricated micromixer was 0.5 × 0.5 mm2, enabling significantly promotion of the throughput of the micromixer. The performance of the fabricated micromixers was evaluated by mixing up blue and yellow ink solutions with a flow rate as high as 6 mL/min.

Scalable shape-controlled fabrication of curved microstructures using a femtosecond laser wet-etching process

2013 ◽  
Vol 33 (5) ◽  
pp. 2795-2799 ◽  
Author(s):  
Hao Bian ◽  
Qing Yang ◽  
Feng Chen ◽  
Hewei Liu ◽  
Guangqing Du ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Wet Etching ◽  
Etching Process ◽  
Shape Controlled

Sapphire-Based Fresnel Zone Plate Fabricated by Femtosecond Laser Direct Writing and Wet Etching

2016 ◽  
Vol 28 (12) ◽  
pp. 1290-1293 ◽  
Author(s):  
Qian-Kun Li ◽  
Yan-Hao Yu ◽  
Lei Wang ◽  
Xiao-Wen Cao ◽  
Xue-Qing Liu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Fresnel Zone ◽  
Wet Etching ◽  
Zone Plate ◽  
Fresnel Zone Plate ◽  
Direct Writing ◽  
Laser Direct Writing

Application of Femtosecond Laser Irradiation and Wet Etching in Fabrication of Microstructures in Crystal Materials

2020 ◽  
Vol 57 (11) ◽  
pp. 111419
Author(s):  
沈天伦 Shen Tianlun ◽  
司金海 Si Jinhai ◽  
陈涛 Chen Tao ◽  
侯洵 Hou Xun
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Wet Etching ◽  
Femtosecond Laser Irradiation

scholarly journals Maskless fabrication of concave microlens arrays on silica glasses by a femtosecond-laser-enhanced local wet etching method

2010 ◽  
Vol 18 (19) ◽  
pp. 20334 ◽  
Author(s):  
Feng Chen ◽  
Hewei Liu ◽  
Qing Yang ◽  
Xianhua Wang ◽  
Cong Hou ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Wet Etching ◽  
Microlens Arrays ◽  
Silica Glasses ◽  
Etching Method

Simple fabrication of closed-packed IR microlens arrays on silicon by femtosecond laser wet etching

2015 ◽  
Vol 121 (1) ◽  
pp. 157-162 ◽  
Author(s):  
Xiangwei Meng ◽  
Feng Chen ◽  
Qing Yang ◽  
Hao Bian ◽  
Guangqing Du ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Wet Etching ◽  
Microlens Arrays

scholarly journals Underwater superoleophobic and anti-oil microlens array prepared by combing femtosecond laser wet etching and direct writing techniques

2019 ◽  
Vol 27 (24) ◽  
pp. 35903 ◽  
Author(s):  
Minjing Li ◽  
Qing Yang ◽  
Jiale Yong ◽  
Jie Liang ◽  
Yao Fang ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Microlens Array ◽  
Wet Etching ◽  
Direct Writing
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