The paper introduces fabrication processes of a micro corona motor and micro gas bearings via X-ray lithography. The micro corona motor was fabricated using a membrane-less built-on X-ray mask. The motor principle requires axially thick sharp stator electrodes. Therefore, X-ray lithography was adopted for precise, high aspect ratio characteristics. To minimize diffraction, a built-on X-ray mask (conformal mask) technique was employed with negative toned SU-8 photo resist. This technique may be suitable for fast fabrication of prototypes or very tall structures, which can be largely affected by printing gaps. Micro gas bearings were fabricated as a viable bearing system for the micro corona motor. Timembrane mask was fabricated to meet the strict performance requirements and geometric constraints of the micro gas bearing. Test results of the micro gas bearings and micro corona motor are also presented.