scholarly journals Correlation between Performances of the a-Si Solar Cells and Properties of the i-Layers Deposited at Extremely High Rates by Atmospheric Pressure Plasma CVD

2004 ◽  
Vol 70 (4) ◽  
pp. 562-567
Author(s):  
Yuzo MORI ◽  
Hiroaki KAKIUCHI ◽  
Kumayasu YOSHII ◽  
Kiyoshi YASUTAKE ◽  
Hiromasa OHMI ◽  
...  
Keyword(s):  
Solar Cells ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Cvd ◽  
Pressure Plasma ◽  
Si Solar Cells

scholarly journals Ultrahigh-rate Deposition of Amorphous Silicon Films for Solar Cells by Atmospheric Pressure Plasma CVD.

2002 ◽  
Vol 68 (8) ◽  
pp. 1077-1081 ◽  
Author(s):  
Yuzo MORI ◽  
Hiroaki KAKIUCHI ◽  
Kumayasu YOSHII ◽  
Kiyoshi YASUTAKE ◽  
Mitsuhiro MATSUMOTO ◽  
...  
Keyword(s):  
Solar Cells ◽  
Amorphous Silicon ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Silicon Films ◽  
Plasma Cvd ◽  
Pressure Plasma

High-quality epitaxial Si growth at low temperatures by atmospheric pressure plasma CVD

2008 ◽  
Vol 517 (1) ◽  
pp. 242-244 ◽  
Author(s):  
K. Yasutake ◽  
H. Ohmi ◽  
Y. Kirihata ◽  
H. Kakiuchi
Keyword(s):  
Atmospheric Pressure ◽  
Low Temperatures ◽  
Atmospheric Pressure Plasma ◽  
Plasma Cvd ◽  
High Quality ◽  
Pressure Plasma

In situ B-doped Si epitaxial growth at low temperatures by atmospheric-pressure plasma CVD

2008 ◽  
Vol 40 (6-7) ◽  
pp. 984-987 ◽  
Author(s):  
Y. Kirihata ◽  
T. Nomura ◽  
H. Ohmi ◽  
H. Kakiuchi ◽  
K. Yasutake
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Low Temperatures ◽  
Atmospheric Pressure Plasma ◽  
Plasma Cvd ◽  
Pressure Plasma

The Selective Emitter Doping of P-Type Solar Cells Using Atmospheric Pressure Plasma Jet

2016 ◽  
Vol 16 (10) ◽  
pp. 10711-10715
Author(s):  
Myoung Soo Yun ◽  
Tae Hun Jo ◽  
Sang-Hyuk Hwang ◽  
In Tae Kim ◽  
Eun Ha Choi ◽  
...  
Keyword(s):  
Solar Cells ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Atmospheric Pressure Plasma Jet ◽  
Selective Emitter ◽  
Pressure Plasma
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