In situ B-doped Si epitaxial growth at low temperatures by atmospheric-pressure plasma CVD

2008 ◽  
Vol 40 (6-7) ◽  
pp. 984-987 ◽  
Author(s):  
Y. Kirihata ◽  
T. Nomura ◽  
H. Ohmi ◽  
H. Kakiuchi ◽  
K. Yasutake
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Low Temperatures ◽  
Atmospheric Pressure Plasma ◽  
Plasma Cvd ◽  
Pressure Plasma

In Situ Doped Si Selective Epitaxial Growth at Low Temperatures by Atmospheric Pressure Plasma CVD

2019 ◽  
Vol 25 (8) ◽  
pp. 309-315 ◽  
Author(s):  
Takayuki Ohnishi ◽  
Yutaka Kirihata ◽  
Hiromasa Ohmi ◽  
Hiroaki Kakiuchi ◽  
Kiyoshi Yasutake
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Low Temperatures ◽  
Atmospheric Pressure Plasma ◽  
Plasma Cvd ◽  
Selective Epitaxial Growth ◽  
Pressure Plasma

High-quality epitaxial Si growth at low temperatures by atmospheric pressure plasma CVD

2008 ◽  
Vol 517 (1) ◽  
pp. 242-244 ◽  
Author(s):  
K. Yasutake ◽  
H. Ohmi ◽  
Y. Kirihata ◽  
H. Kakiuchi
Keyword(s):  
Atmospheric Pressure ◽  
Low Temperatures ◽  
Atmospheric Pressure Plasma ◽  
Plasma Cvd ◽  
High Quality ◽  
Pressure Plasma

High-Rate Growth of Defect-Free Epitaxial Si at Low Temperatures by Atmospheric Pressure Plasma CVD

2005 ◽  
Author(s):  
Takuya Wakamiya ◽  
Hiromasa Ohmi ◽  
Hiroaki Kakiuchi ◽  
Heiji Watanabe ◽  
Kiyoshi Yasutake ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Low Temperatures ◽  
Atmospheric Pressure Plasma ◽  
High Rate ◽  
Plasma Cvd ◽  
Pressure Plasma

scholarly journals In Situ Investigation of the Formation Kinematics of Plasma-Generated Silver Nanoparticles

Nanomaterials ◽  
2020 ◽  
Vol 10 (3) ◽  
pp. 555 ◽  
Author(s):  
Daniel Tasche ◽  
Mirco Weber ◽  
Julia Mrotzek ◽  
Christoph Gerhard ◽  
Stephan Wieneke ◽  
...  
Keyword(s):  
Silver Nanoparticles ◽  
Atmospheric Pressure ◽  
Nanoparticle Synthesis ◽  
Atmospheric Pressure Plasma ◽  
Spherical Particles ◽  
Synthesis Process ◽  
Plasma Exposure ◽  
Pressure Plasma ◽  
In Situ Investigation

In this publication, it is shown how to synthesize silver nanoparticles from silver cations out of aqueous solutions by the use of an atmospheric pressure plasma source. The use of an atmospheric pressure plasma leads to a very fast reduction of silver ions in extensive solvent volumes. In order to investigate the nanoparticle synthesis process, ultraviolet/visible (UV/VIS) absorption spectra were recorded in situ. By using transmission electron microscopy and by the analysis of UV/VIS spectra, the kinetics of silver nanoparticle formation by plasma influence can be seen in more detail. For example, there are two different sections visible in the synthesis during the plasma exposure process. The first section of the synthesis is characterized by a linear formation of small spherical particles of nearly constant size. The second section is predominated by saturation effects. Here, particle faults are increasingly formed, induced by changes in the particle shape and the fusion of those particles. The plasma exposure time, therefore, determines the shape and size distribution of the nanoparticles.

scholarly journals In Situ Surface Modification of Paper-Based Relics with Atmospheric Pressure Plasma Treatment for Preservation Purposes

Polymers ◽  
2019 ◽  
Vol 11 (5) ◽  
pp. 786
Author(s):  
Xu Yan ◽  
Guo-Sai Liu ◽  
Jing Yang ◽  
Yi Pu ◽  
Shuo Chen ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Good Method ◽  
Contact Angles ◽  
Water Penetration ◽  
Water Contact ◽  
Pressure Plasma ◽  
Static Water

Paper-based relics, which are an important part of cultural heritage worldwide, are at risk of imminent damage from various environmental sources. To protect them, the atmospheric pressure plasma polymerization of hexamethyldisiloxane (HMDSO) precursor has been explored on paper-based relics in situ. The macro and micro images taken during this process suggest that the in situ plasma treatment does not change the macro morphology and the micro structure of the treated paper-based relic samples. On the other hand, plasma treatment causes the polymerization of the HMDSO which then produces nanoparticles deposited onto the paper-based relics. These nanoparticles provide good waterproof properties with large static water contact angles and smaller rolling angles, which protect the paper-based relics from water penetration. Moreover, since the nanoparticles are deposited onto the fibers, waterproof fastness is ensured. Also, the examined mechanical properties of the treated and untreated paper-based relics indicate that the atmospheric pressure plasma treatment does not affect the strength of the paper very much. The results in this study show that atmospheric pressure plasma treatment with the use of HMDSO precursor is a good method to preserve paper-based relics.

Sign in / Sign up

Export Citation Format

Share Document