Evaluation of Film Property and Strength in Hexagonal AlN Thin Film
2012 ◽
Vol 61
(7)
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pp. 598-603
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2006 ◽
Vol 2006.43
(0)
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pp. 85-86
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2007 ◽
Vol 31
(3)
◽
pp. 313-321
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2002 ◽
Vol 132
(04)
◽
pp. 911
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