scholarly journals Thermal Relaxation of Residual Stresses in Multi Hard Films Deposited by Arc Ion Plating

2007 ◽  
Vol 56 (7) ◽  
pp. 635-640 ◽  
Author(s):  
Tatsuya MATSUE ◽  
Takao HANABUSA ◽  
Yasukazu IKEUCHI
2010 ◽  
Vol 652 ◽  
pp. 296-302 ◽  
Author(s):  
Tatsuya Matsue ◽  
Hanabusa Takao ◽  
Kazuya Kusaka ◽  
Osamu Sakata ◽  
Nishida Masayuki

The structures of Cr-N films deposited by arc ion plating on steel substrates were investigated using a synchrotron radiation system that emits ultraintense X-rays. The Cr-N films were found to be mainly composed of {110} oriented CrN crystals, but they also had a small component of randomly oriented Cr2N crystals. The CrN220 diffraction shifts to a high diffraction angle as the annealing temperature increases. In contrast, the peak position of the Cr2N211 diffraction hardly changes with an increase in the annealing temperature up to 873 K. The ratio of nitrogen and oxygen to chromium at the film surface and inside in the film was estimated by Auger electron spectroscopy. After annealing at 973 K, the surface layer was oxidized, but the composition inside the Cr-N films (N/Cr = 0.83) remained unchanged. The residual stress in a 1600-nm-thick as-deposited CrN layer was found to be -11.0 GPa. The residual stresses of Cr-N films relaxed to thermal stress levels on annealing. However, the residual stress in the Cr2N layer could not be evaluated.


Vacuum ◽  
2021 ◽  
pp. 110152
Author(s):  
Lijun Xian ◽  
Haibo Zhao ◽  
Guang Xian ◽  
Chencheng Wang ◽  
Hong He

Rare Metals ◽  
2016 ◽  
Vol 36 (11) ◽  
pp. 858-864 ◽  
Author(s):  
Jin-Long Li ◽  
Gang-Yi Cai ◽  
Hua-Sheng Zhong ◽  
Yong-Xin Wang ◽  
Jian-Min Chen

2011 ◽  
Vol 306-307 ◽  
pp. 274-279
Author(s):  
Qing Tao ◽  
Yan Wei Sui ◽  
Sun Zhi ◽  
Wei Song

AlN and TiN thin films are widely used in electronic devices and acoustic material and other fields because of its unique merit, the preparation of nitride thin films by using the arc ion plating has not been a systematic and deep study. The article presents our research procedure which the AlN and TiN thin films are deposited on stainless steel substrate by arc ion plating (AIP). The characteristics of thin films, for example microstructure, morphology, composition analysis and hardness, are examined and analyzed. The results showed that: Droplet-like particles appear in the microstructure of nitride thin films, and the grain size of droplet-like particles in AlN thin films is greater than in TiN thin films. The micro-hardness of nitride films preparation in experiment has improved significantly, and establish firmly basic for extending the application field of nitride film.


2021 ◽  
pp. 109476
Author(s):  
Jiaojiao Wu ◽  
Mingli Shen ◽  
Ming Hu ◽  
Cean Guo ◽  
Qiang Li ◽  
...  

Coatings ◽  
2020 ◽  
Vol 10 (9) ◽  
pp. 841
Author(s):  
Yanmei Liu ◽  
Tie-Gang Wang ◽  
Wei Lin ◽  
Qiang Zhu ◽  
Bing Yan ◽  
...  

Aluminum rich nitride coatings are often used to protect cutting tools and prolong their service life. In this work, a preoxidation technique and duplex coating design were combined to further improve the bearing capacity and heat resistance of cutting tools. The Al-Cr-Si-N, Al-Cr-Si-O-N, and Al-Cr-Si-N/Al-Cr-Si-O-N duplex coatings were developed by arc ion plating, respectively. The morphology, phase constituents, mechanical and tribological properties of the coatings were characterized and tested by SEM, XRD, a micro-hardness tester, scratch tester, and tribometer. The results showed the coating became more compact and smoother after oxygen doping. However, the Al-Cr-Si-N coating presented the best mechanical properties and tribological behaviors. Its hardness and critical load showed the highest values, which were about 4000 HV and 81 N, respectively. A friction coefficient of 0.67 and wear rate of 1.4 × 10−3 μm3/N·mm were also the lowest values in the study. The three coatings were deposited on the same solid carbide end mills and performed the cutting tests under same conditions. By comparison, the Al-Cr-Si-N coated tool presented the longest tool life and minimum cutting force when cutting C1045 medium-carbon steel. After 90 min of dry milling, the width of the flank wear band (VB) of the AlCrSiN coated tool reached 135 μm, which was much lower than that of the other two coated tools.


Sign in / Sign up

Export Citation Format

Share Document