Machining of micrometer-scale high aspect ratio features with single femtosecond laser pulses

2020 ◽  
Vol 32 (3) ◽  
pp. 032021
Author(s):  
Brian K. Canfield ◽  
Lino Costa ◽  
Deepak Rajput ◽  
Alexander Terekhov ◽  
Kathleen Lansford ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
High Aspect Ratio ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Micrometer Scale

Machining High Aspect Ratio Features with Single Femtosecond Laser Pulses

2014 ◽  
Author(s):  
Brian K. Canfield ◽  
Trevor S. Bowman ◽  
Lino Costa ◽  
Deepak Rajput ◽  
Alexander Terekhov ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
High Aspect Ratio ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses

Sub-surface, micrometer-scale incisions produced in rodent cortex using tightly-focused femtosecond laser pulses

2011 ◽  
Vol 43 (5) ◽  
pp. 382-391 ◽  
Author(s):  
John Nguyen ◽  
Jillian Ferdman ◽  
Mingrui Zhao ◽  
David Huland ◽  
Shatha Saqqa ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Micrometer Scale

Inorganic-organic Hybrid Materials for Real 3-D Sub-νm Lithography

2003 ◽  
Vol 780 ◽  
Author(s):  
R. Houbertz ◽  
J. Schulz ◽  
L. Fröhlich ◽  
G. Domann ◽  
M. Popall ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Sol Gel ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Hybrid Polymer ◽  
Organic Hybrid ◽  
Two Photon ◽  
Applied Technology ◽  
Scale Structures ◽  
Sol Gel Synthesis

AbstractReal 3-D sub-νm lithography was performed with two-photon polymerization (2PP) using inorganic-organic hybrid polymer (ORMOCER®) resins. The hybrid polymers were synthesized by hydrolysis/polycondensation reactions (modified sol-gel synthesis) which allows one to tailor their material properties towards the respective applications, i.e., dielectrics, optics or passivation. Due to their photosensitive organic functionalities, ORMOCER®s can be patterned by conventional photo-lithography as well as by femtosecond laser pulses at 780 nm. This results in polymerized (solid) structures where the non-polymerized parts can be removed by conventional developers.ORMOCER® structures as small as 200 nm or even below were generated by 2PP of the resins using femtosecond laser pulses. It is demonstrated that ORMOCER®s have the potential to be used in components or devices built up by nm-scale structures such as, e.g., photonic crystals. Aspects of the materials in conjunction to the applied technology are discussed.

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