scholarly journals Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching

2004 ◽  
Vol 12 (10) ◽  
pp. 2120 ◽  
Author(s):  
Yves Bellouard ◽  
Ali Said ◽  
Mark Dugan ◽  
Philippe Bado
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
High Aspect Ratio ◽  
Chemical Etching ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses

Machining of micrometer-scale high aspect ratio features with single femtosecond laser pulses

2020 ◽  
Vol 32 (3) ◽  
pp. 032021
Author(s):  
Brian K. Canfield ◽  
Lino Costa ◽  
Deepak Rajput ◽  
Alexander Terekhov ◽  
Kathleen Lansford ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
High Aspect Ratio ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Micrometer Scale

Machining High Aspect Ratio Features with Single Femtosecond Laser Pulses

2014 ◽  
Author(s):  
Brian K. Canfield ◽  
Trevor S. Bowman ◽  
Lino Costa ◽  
Deepak Rajput ◽  
Alexander Terekhov ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
High Aspect Ratio ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses

Fabrication of long microchannels with circular cross section using astigmatically shaped femtosecond laser pulses and chemical etching

2006 ◽  
Vol 88 (19) ◽  
pp. 191107 ◽  
Author(s):  
Valeria Maselli ◽  
Roberto Osellame ◽  
Giulio Cerullo ◽  
Roberta Ramponi ◽  
Paolo Laporta ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Cross Section ◽  
Chemical Etching ◽  
Circular Cross Section ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses
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