Three-dimensional micro/nano-fabrication by integration of additive and subtractive femtosecond-laser direct writing processes

2012 ◽  
Author(s):  
Wei Xiong ◽  
Yunshen Zhou ◽  
Xiangnan He ◽  
Yang Gao ◽  
Masoud Mahjouri-Samani ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Nano Fabrication ◽  
Writing Processes

Three-dimensional sub-wavelength fabrication by integration of additive and subtractive femtosecond-laser direct writing

2013 ◽  
Vol 1499 ◽  
Author(s):  
Wei Xiong ◽  
Yunshen Zhou ◽  
Xiangnan He ◽  
Yang Gao ◽  
Masoud Mahjouri-Samani ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Nano Fabrication ◽  
Two Photon ◽  
Micro Fluidics ◽  
Wide Range ◽  
Device Structures ◽  
Two Photon Polymerization

ABSTRACTAdditive nanofabrication by two-photon polymerization (TPP) has recently drawn increased attention due to its sub-100 nm resolution and truly three-dimensional (3D) structuring capability. However, besides additive processes, subtractive process is also demanded for many 3D fabrications. Method possessing both additive and subtractive fabrication capabilities was rarely reported. In this study, we developed a complementary 3D micro/nano-fabrication process by integrating both additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) into a single platform of femtosecond-laser direct writing process. Functional device structures were successfully fabricated including: polymer fiber Bragg gratings containing periodic holes of 500-nm diameter and 3D micro-fluidic systems containing arrays of channels of 1-µm diameter. The integration of TPP and MPA processes enhances the nanofabrication efficiency and enables the fabrication of complex 3D micro/nano-structures that are impractical to produce by either TPP or MPA alone, which is promising for a wide range of applications including integrated optics, metamaterials, MEMS, and micro-fluidics.

Three-dimensional staggered herringbone mixer fabricated by femtosecond laser direct writing

2013 ◽  
Vol 15 (2) ◽  
pp. 025601 ◽  
Author(s):  
Di Lin ◽  
Fei He ◽  
Yang Liao ◽  
Jintian Lin ◽  
Changning Liu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing

Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing

Lab on a Chip ◽  
2012 ◽  
Vol 12 (4) ◽  
pp. 746 ◽  
Author(s):  
Yang Liao ◽  
Jiangxin Song ◽  
En Li ◽  
Yong Luo ◽  
Yinglong Shen ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Rapid Prototyping ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Microfluidic Mixers

Three-dimensional micropatterning of graphene by femtosecond laser direct writing technology

2019 ◽  
Vol 45 (1) ◽  
pp. 113 ◽  
Author(s):  
Yu-Qing Liu ◽  
Jiang-Wei Mao ◽  
Zhao-Di Chen ◽  
Dong-Dong Han ◽  
Zhi-Zhen Jiao ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Three Dimensional ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Writing Technology
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