Laser imaging system for flat panel display industry

Author(s):  
K. R. Kim ◽  
I. T. Park ◽  
H. W. Kim ◽  
Y. W. Lee ◽  
C. H. Cho ◽  
...  
2011 ◽  
Vol 314-316 ◽  
pp. 1910-1913
Author(s):  
Xin Xing Wang ◽  
Jin Yun Zhou ◽  
Liang Lei ◽  
Qing Hua Lin ◽  
Ying Shi ◽  
...  

As the higher and higher demand for image definition of flat-panel display (FPD), the minimum linewidth of pixel electrode, which is based on the Indium-Tin-Oxide (ITO) glass, has become narrower and narrower. The feature size of sub-pixel electrode has been narrowed from about 60~100 µm to below 20 µm in recent years. Hence the lithography technology has played a more and more important role in the fabrication of FPD. The laser projection imaging (LPI) technology can solve the problems obviously. In this paper, by using of the 351nm XeF excimer laser projection imaging system we can obtain developed pictures at the resolution between 10 and 20 µm on the ITO glass. In addition, the relation graphs between 10~20 µm linewidth and the modulation transfer function(MTF)of the projection system are simulated and analyzed by the ZEMAX and MATLAB software. Consequently, our system can satisfy the linewidth of the sub-pixel electrode at the resolution between 10 and 20 µm in the production of FPD.


2018 ◽  
Vol 4 (11) ◽  
pp. 133
Author(s):  
HyungTae Kim ◽  
EungJoo Ha ◽  
KyungChan Jin ◽  
ByungWook Kim

A system for inspecting flat panel displays (FPDs) acquires scanning images using multiline charge-coupled device (CCD) cameras and industrial machine vision. Optical filters are currently installed in front of these inspection systems to obtain high-quality images. However, the combination of optical filters required is determined manually and by using empirical methods; this is referred to as passive color control. In this study, active color control is proposed for inspecting FPDs. This inspection scheme requires the scanning of images, which is achieved using a mixed color light source and a mixing algorithm. The light source utilizes high-power light emitting diodes (LEDs) of multiple colors and a communication port to dim their level. Mixed light illuminates an active-matrix organic light-emitting diode (AMOLED) panel after passing through a beam expander and after being shaped into a line beam. The image quality is then evaluated using the Tenenbaum gradient after intensity calibration of the scanning images. The dimming levels are determined using the simplex search method which maximizes the image quality. The color of the light was varied after every scan of an AMOLED panel, and the variation was iterated until the image quality approached a local maximization. The number of scans performed was less than 225, while the number of dimming level combinations was 20484. The proposed method can reduce manual tasks in setting-up inspection machines, and hence is useful for the inspection machines in FPD processes.


2011 ◽  
Vol 50 (3) ◽  
pp. 03CB06 ◽  
Author(s):  
Tong-Hun Hwang ◽  
Ik-Seok Yang ◽  
Oh-Kyong Kwon ◽  
Min-Ki Ryu ◽  
Choon-Won Byun ◽  
...  

2013 ◽  
Vol 26 (2) ◽  
pp. 250-258 ◽  
Author(s):  
Naohisa Yoshida ◽  
Nobuaki Yagi ◽  
Yutaka Inada ◽  
Munehiro Kugai ◽  
Tetsuya Okayama ◽  
...  

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