Real-time monitoring and expert control of laser cleaning

2000 ◽  
Author(s):  
J. M. Lee ◽  
K. G. Watkins ◽  
W. M. Steen
Keyword(s):  
Real Time ◽  
Laser Cleaning ◽  
Real Time Monitoring ◽  
Expert Control

Automatic Control and Real-Time Monitoring of Laser Cleaning and Laser Ablation

1998 ◽  
Vol 526 ◽  
Author(s):  
Y.F. Lu ◽  
M. Meng ◽  
M.H. Hong ◽  
T.S. Low ◽  
D.S.H. Chan
Keyword(s):  
Control System ◽  
Automatic Control ◽  
Real Time ◽  
Excimer Laser ◽  
Automatic Control System ◽  
Surface Cleaning ◽  
Laser Cleaning ◽  
Laser Surface ◽  
Feedback Signal ◽  
Real Time Monitoring

AbstractClosed-loop control and real-time monitoring of pulsed excimer laser cleaning and ablation have been realised by software and hardware design and development. The audible acoustic wave generated during excimer laser surface cleaning and ablation has been used as the feedback signal for the automatic control system of laser-surface interaction. Man–machine interface for laser operation and acoustic monitoring has been developed with LabVIEW 4.1 under Windows 95 environment. This system has been used to control and monitor laser cleaning and ablation processes in real-time and proven to successfully meet the requirements in our study. By database exchange, this automatic control system can also be applied to control drilling and materials removing.

Laser Cleaning of IC Mould and Its Real-Time Monitoring

2000 ◽  
Vol 39 (Part 1, No. 8) ◽  
pp. 4811-4813 ◽  
Author(s):  
Yong-Feng Lu ◽  
Wen-Dong Song ◽  
Ming-Hui Hong ◽  
Zhong-Min Ren ◽  
Qiong Chen ◽  
...  
Keyword(s):  
Real Time ◽  
Laser Cleaning ◽  
Real Time Monitoring

LASER CLEANING OF ORGANIC CONTAMINATION ON MICROELECTRONIC DEVICES AND PROCESS REAL-TIME MONITORING

2002 ◽  
pp. 433-464 ◽  
Author(s):  
M. H. Hong ◽  
W. D. Song ◽  
Y. F. Lu ◽  
B. Luk'yanchuk ◽  
T. C. Chong
Keyword(s):  
Real Time ◽  
Laser Cleaning ◽  
Real Time Monitoring ◽  
Organic Contamination ◽  
Microelectronic Devices

Real-Time Monitoring for Laser Surface Cleaning

1994 ◽  
Vol 354 ◽  
Author(s):  
Y.F. Lu ◽  
M.H. Hong ◽  
Y. Aoyagi
Keyword(s):  
Acoustic Wave ◽  
Real Time ◽  
Laser Irradiation ◽  
Frequency Spectrum ◽  
Acoustic Waves ◽  
Surface Condition ◽  
Surface Cleaning ◽  
Laser Cleaning ◽  
Cleaning Process ◽  
Real Time Monitoring

AbstractReal-time monitoring of surface cleanness in laser dry cleaning was investigated by monitoring the acoustic waves emitted from the substrate surface under pulsed laser irradiation. It is found that the acoustic wave from the surface under laser irradiation can reflect the surface condition, i.e., the surface cleanness. Besides the surface condition, the acoustic waveforms also depend on the substrate materials and laser pulse energies (intensities). The frequency spectrum obtained from the Fourier transform can provide clear indication for different surface cleanness. Removing of surface contaminants can generally result in weaker laser-induced acoustic wave and change in the frequency spectrum. The surface cleanness, therefore, can be monitored in real-time by detecting the amplitude and frequency of the acoustic wave during the laser cleaning process. This phenomenon provides the laser cleaning technique a real-time feedback during the cleaning process.

Real-time monitoring of laser cleaning by an airborne particle counter

2003 ◽  
Vol 208-209 ◽  
pp. 306-310 ◽  
Author(s):  
W.D. Song ◽  
M.H. Hong ◽  
S.H. Lee ◽  
Y.F. Lu ◽  
T.C. Chong
Keyword(s):  
Real Time ◽  
Laser Cleaning ◽  
Real Time Monitoring ◽  
Airborne Particle ◽  
Particle Counter

1618: Real-Time Monitoring of Nitric Oxide and Blood Flow During Ischemia-Reperfusion in the Rat Testis

2006 ◽  
Vol 175 (4S) ◽  
pp. 521-521
Author(s):  
Motoaki Saito ◽  
Tomoharu Kono ◽  
Yukako Kinoshita ◽  
Itaru Satoh ◽  
Keisuke Satoh
Keyword(s):  
Nitric Oxide ◽  
Blood Flow ◽  
Real Time ◽  
Ischemia Reperfusion ◽  
Real Time Monitoring ◽  
Rat Testis

GaN heteroepitaxy by remote plasma MOCVD : Real time monitoring by laser reflectance interferometry

2001 ◽  
Vol 11 (PR3) ◽  
pp. Pr3-1175-Pr3-1182 ◽  
Author(s):  
M. Losurdo ◽  
A. Grimaldi ◽  
M. Giangregorio ◽  
P. Capezzuto ◽  
G. Bruno
Keyword(s):  
Real Time ◽  
Real Time Monitoring ◽  
Remote Plasma ◽  
Laser Reflectance

INVESTIGATION OF HAND KINEMATICS TOWARDS FRONT CRAWL SWIMMING USING NON-INVASIVE REAL-TIME MONITORING SYSTEM

2014 ◽  
Author(s):  
Rozaimi Ghazali ◽  
◽  
Asiah Mohd Pilus ◽  
Wan Mohd Bukhari Wan Daud ◽  
Mohd Juzaila Abd Latif ◽  
...  
Keyword(s):  
Real Time ◽  
Monitoring System ◽  
Real Time Monitoring ◽  
Front Crawl ◽  
Non Invasive ◽  
Hand Kinematics
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