The effects of gaseous impurities on excimer laser operation

1993 ◽  
Author(s):  
J. Gabzdyl ◽  
M. O’Key
Keyword(s):  
Excimer Laser ◽  
Laser Operation

scholarly journals High Repetition-Rate Excimer Laser (II). 4kHz, 200W XeCl laser operation in low Xe contens.

1993 ◽  
Vol 21 (5) ◽  
pp. 566-576 ◽  
Author(s):  
Shigeyuki TAKAGI ◽  
Koji KAKIZAKI ◽  
Noboru OKAMOTO ◽  
Saburo SATO ◽  
Tatsumi GOTO
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Laser Operation ◽  
Xecl Laser ◽  
High Repetition

Effect of gas composition and purity on excimer laser operation

1994 ◽  
Author(s):  
J. Gabzdyl ◽  
I. J. Stares ◽  
D. Yates ◽  
Michael R. Osborne ◽  
Michael A. O'Key
Keyword(s):  
Excimer Laser ◽  
Laser Operation ◽  
Gas Composition

scholarly journals Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process

2018 ◽  
Vol 6 ◽  
Author(s):  
Xin Guo ◽  
Jinbin Ding ◽  
Yi Zhou ◽  
Yu Wang
Keyword(s):  
Excimer Laser ◽  
Copper Alloy ◽  
Optical Microscope ◽  
Copper Surface ◽  
Laser Operation ◽  
Operation Process ◽  
Long Time ◽  
Corrosion Behaviors ◽  
Arf Excimer Laser ◽  
Corrosion Pits

The corrosion behaviors of the ArF excimer laser copper alloy electrodes were studied. The morphology, composition and impurities were characterized by optical microscope, scanning electron microscopy, electron microprobe and glow discharge mass spectrometer methods. The anode produces the reef, the corrosion pits, the hole layer and the $1{-}10~\unicode[STIX]{x03BC}\text{m}$ level flake impurity. The cathode produces the particles, the sputtering pits, the element reduce layer and the $1~\unicode[STIX]{x03BC}\text{m}$ level particle impurity. Besides the Cu element, other elements in the alloy participate in the corrosion: Al element in the reef is over 1.5 times of the anode, Zn element in the particles is 1.3 times of the cathode, many trace elements congregate on the copper surface several and even hundreds of times. These elements are responsible to a great degree for the impurities and the rapid energy decline of the long-time idled laser.

scholarly journals Tunable KrCl excimer-laser operation for combustion diagnostics

1996 ◽  
Vol 35 (3) ◽  
pp. 482 ◽  
Author(s):  
Michael Decker ◽  
Volker Sick
Keyword(s):  
Excimer Laser ◽  
Laser Operation ◽  
Combustion Diagnostics

Spectroscopy, modelling and laser operation of holmium doped laser crystals

1994 ◽  
Vol 04 (C4) ◽  
pp. C4-573-C4-577 ◽  
Author(s):  
Y. KALISKY ◽  
S. R. ROTMAN ◽  
G. BOULON ◽  
C. PEDRINI ◽  
A. BRENIER
Keyword(s):  
Laser Operation ◽  
Laser Crystals
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