Effect of gas composition and purity on excimer laser operation

1994 ◽  
Author(s):  
J. Gabzdyl ◽  
I. J. Stares ◽  
D. Yates ◽  
Michael R. Osborne ◽  
Michael A. O'Key
Keyword(s):  
Excimer Laser ◽  
Laser Operation ◽  
Gas Composition

Dependence of excimer laser beam properties on laser gas composition

1993 ◽  
Author(s):  
Robert E. Turner ◽  
John L. Remo ◽  
Vinod Kumar
Keyword(s):  
Laser Beam ◽  
Excimer Laser ◽  
Gas Composition

scholarly journals High Repetition-Rate Excimer Laser (II). 4kHz, 200W XeCl laser operation in low Xe contens.

1993 ◽  
Vol 21 (5) ◽  
pp. 566-576 ◽  
Author(s):  
Shigeyuki TAKAGI ◽  
Koji KAKIZAKI ◽  
Noboru OKAMOTO ◽  
Saburo SATO ◽  
Tatsumi GOTO
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Laser Operation ◽  
Xecl Laser ◽  
High Repetition

scholarly journals Corrosion behaviors of the copper alloy electrodes in ArF excimer laser operation process

2018 ◽  
Vol 6 ◽  
Author(s):  
Xin Guo ◽  
Jinbin Ding ◽  
Yi Zhou ◽  
Yu Wang
Keyword(s):  
Excimer Laser ◽  
Copper Alloy ◽  
Optical Microscope ◽  
Copper Surface ◽  
Laser Operation ◽  
Operation Process ◽  
Long Time ◽  
Corrosion Behaviors ◽  
Arf Excimer Laser ◽  
Corrosion Pits

The corrosion behaviors of the ArF excimer laser copper alloy electrodes were studied. The morphology, composition and impurities were characterized by optical microscope, scanning electron microscopy, electron microprobe and glow discharge mass spectrometer methods. The anode produces the reef, the corrosion pits, the hole layer and the $1{-}10~\unicode[STIX]{x03BC}\text{m}$ level flake impurity. The cathode produces the particles, the sputtering pits, the element reduce layer and the $1~\unicode[STIX]{x03BC}\text{m}$ level particle impurity. Besides the Cu element, other elements in the alloy participate in the corrosion: Al element in the reef is over 1.5 times of the anode, Zn element in the particles is 1.3 times of the cathode, many trace elements congregate on the copper surface several and even hundreds of times. These elements are responsible to a great degree for the impurities and the rapid energy decline of the long-time idled laser.

scholarly journals Tunable KrCl excimer-laser operation for combustion diagnostics

1996 ◽  
Vol 35 (3) ◽  
pp. 482 ◽  
Author(s):  
Michael Decker ◽  
Volker Sick
Keyword(s):  
Excimer Laser ◽  
Laser Operation ◽  
Combustion Diagnostics

XeCl laser operation with liquid chlorine donors: An experimental investigation on the gas composition

1981 ◽  
Vol 39 (1-2) ◽  
pp. 75-78 ◽  
Author(s):  
R. Salimbeni ◽  
M. Matera ◽  
M. Vannini ◽  
P. Burlamacchi
Keyword(s):  
Experimental Investigation ◽  
Laser Operation ◽  
Gas Composition ◽  
Xecl Laser

ESEM - A multipurpose surface Electron Microscope

1986 ◽  
Vol 44 ◽  
pp. 632-633 ◽  
Author(s):  
G.D. Danilatos
Keyword(s):  
Electron Microscope ◽  
Room Temperature ◽  
Environmental Scanning ◽  
Gas Composition ◽  
Saturated Water Vapor ◽  
Surface Electron ◽  
Current State ◽  
Saturated Water ◽  
New Type ◽  
Temperature And Pressure

Over recent years a new type of electron microscope - the environmental scanning electron microscope (ESEM) - has been developed for the examination of specimen surfaces in the presence of gases. A detailed series of reports on the system has appeared elsewhere. A review summary of the current state and potential of the system is presented here.The gas composition, temperature and pressure can be varied in the specimen chamber of the ESEM. With air, the pressure can be up to one atmosphere (about 1000 mbar). Environments with fully saturated water vapor only at room temperature (20-30 mbar) can be easily maintained whilst liquid water or other solutions, together with uncoated specimens, can be imaged routinely during various applications.

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