Laser helical drilling of silicon wafers with ns to fs pulses: Scanning electron microscopy and transmission electron microscopy characterization of drilled through-holes
2009 ◽
2012 ◽
Vol 174-177
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pp. 508-511
2008 ◽
Vol 47
(7)
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pp. 5330-5332
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2020 ◽
Vol 142
(37)
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pp. 15649-15653
2002 ◽
Vol 31
(5)
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pp. 391-394
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1985 ◽
Vol 3
(6)
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pp. 2475-2478
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