Measurements on radio-frequency discharge plasma of silane by coherent anti-Stokes Raman spectroscopy and laser-induced fluorescence.
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1986 ◽
Vol 25
(Part 1, No. 1)
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pp. 108-113
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High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)
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2014 ◽
Vol 18
(1-2)
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pp. 111-117
1998 ◽
Vol 87
(5)
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pp. 905-915
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