Development of XRMF techniques for measurement of multi-layer film thicknesses on semiconductors for VLSI and ULSI integrated circuits. Final CRADA report for CRADA number Y-1292-0130
2020 ◽
Vol 32
(6)
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pp. 1211-1236
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2006 ◽
Vol 2006
(0)
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pp. _611-1_-_611-4_
2007 ◽
Vol 2007.2
(0)
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pp. 33-34