An in-situ technique for measuring Young's modulus and residual stress of each layer for multi-layer film

2005 ◽  
Author(s):  
Meng Nie ◽  
Q. Huarig ◽  
Weihua Li ◽  
Hua Rong
Keyword(s):  
Residual Stress ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Layer Film ◽  
Multi Layer Film ◽  
In Situ Technique

In Situ Measurement of Young’s Modulus and Residual Stress of Thin Electroless Nickel Films for Mems Applications

1994 ◽  
Vol 356 ◽  
Author(s):  
S. Roy ◽  
S. Furukawa ◽  
H. Miyajima ◽  
M. Mehregany
Keyword(s):  
Residual Stress ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Sacrificial Layer ◽  
Electroless Nickel ◽  
Nickel Surface ◽  
Surface Micromachining ◽  
Nickel Films ◽  
Passive Devices

AbstractThis paper reports in situ measurement of Young’s modulus and residual stress of electroless nickel films through the use of microfabricated nickel test structures, including electrostatic microactuators and passive devices. The test structures are fabricated in a new surface micromachining process, termed “nickel surface micromachining”, using electroless plated nickel as the structural layer and polysilicon as the sacrificial layer. Subsequent to fabrication, lateral resonant-type electrostatic microactuators of different geometries are resonated by electrical excitation. Using the measured resonant frequencies and knowledge of the device geometry, the Young’s modulus of the film is determined. The passive electroless nickel microstructures deform upon completion of the fabrication process due to residual stress in the film. Measurement of this deformation in conjunction with an appropriate mechanical model is used to determine the residual stress in the films.

Mechanical Properties of Pyrolytic "SiOCN" Thin Coatings

1993 ◽  
Vol 308 ◽  
Author(s):  
Sandrine Bec ◽  
André Tonck ◽  
Jean-Luc Loubet
Keyword(s):  
Mechanical Properties ◽  
Heat Treatment ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Ceramic Coatings ◽  
Optical Observation ◽  
Thin Coatings ◽  
Polymer Precursors ◽  
Polymeric State

ABSTRACTPyrolysis of polymer precursors (polysilazane) is a technologically and economically interesting way to produce thin ceramic coatings. However, many cracks appear and decohesion occurs during pyrolysis when the ceramic coatings (SiOCN) are thicker than 0.5 micrometers. In order to understand these cracking phenomena, the coatings are mechanically characterized by nanoindentation at different stages of the pyrolysis heat treatment.During pyrolysis, the cracking temperature is detected by in-situ optical observation. The thickness of the coatings varies during pyrolysis from 3 micrometers at the polymeric state to 1 micrometer at the ceramic state. The coatings' properties, hardness and Young's modulus are evaluated after heat treatment, taking into account the substrate's influence. A large variation of these properties occurs at the cracking temperature. Both the hardness and the Young's modulus are multiplied by a factor of 10. By analysing these results, we show that cracking is correlated with the evolution of the coatings' mechanical properties during the transformation.

The evaluation of Young's modulus and residual stress of nickel films by microbridge testings

2004 ◽  
Vol 15 (12) ◽  
pp. 2389-2394 ◽  
Author(s):  
Z M Zhou ◽  
Y Zhou ◽  
C S Yang ◽  
J A Chen ◽  
G F Ding ◽  
...  
Keyword(s):  
Residual Stress ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Nickel Films

scholarly journals Young’s Modulus of Polycrystalline Titania Microspheres Determined by In Situ Nanoindentation and Finite Element Modeling

2014 ◽  
Vol 2014 ◽  
pp. 1-5 ◽  
Author(s):  
Peida Hao ◽  
Yanping Liu ◽  
Yuanming Du ◽  
Yuefei Zhang
Keyword(s):  
Finite Element ◽  
Finite Element Simulation ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Deformation Mechanisms ◽  
Displacement Curve ◽  
Element Simulation ◽  
Nanoindentation Experiment ◽  
Force Displacement

In situ nanoindentation was employed to probe the mechanical properties of individual polycrystalline titania (TiO2) microspheres. The force-displacement curves captured by a hybrid scanning electron microscope/scanning probe microscope (SEM/SPM) system were analyzed based on Hertz’s theory of contact mechanics. However, the deformation mechanisms of the nano/microspheres in the nanoindentation tests are not very clear. Finite element simulation was employed to investigate the deformation of spheres at the nanoscale under the pressure of an AFM tip. Then a revised method for the calculation of Young’s modulus of the microspheres was presented based on the deformation mechanisms of the spheres and Hertz’s theory. Meanwhile, a new force-displacement curve was reproduced by finite element simulation with the new calculation, and it was compared with the curve obtained by the nanoindentation experiment. The results of the comparison show that utilization of this revised model produces more accurate results. The calculated results showed that Young’s modulus of a polycrystalline TiO2microsphere was approximately 30% larger than that of the bulk counterpart.

Microbridge Testing of Thin Films Under Small Deformation

1999 ◽  
Vol 594 ◽  
Author(s):  
T. Y. Zhang ◽  
Y. J. Su ◽  
C. F. Qian ◽  
M. H. Zhao ◽  
L. Q. Chen
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Silicon Nitride ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Chemical Vapor ◽  
Small Deformation ◽  
Nitride Film ◽  
Silicon Nitride Film ◽  
Pressure Chemical

AbstractThe present work proposes a novel microbridge testing method to simultaneously evaluate the Young's modulus, residual stress of thin films under small deformation. Theoretic analysis and finite element calculation are conducted on microbridge deformation to provide a closed formula of deflection versus load, considering both substrate deformation and residual stress in the film. Silicon nitride films fabricated by low pressure chemical vapor deposition on silicon substrates are tested to demonstrate the proposed method. The results show that the Young's modulus and residual stress for the annealed silicon nitride film are respectively 202 GPa and 334.9 MPa.

Measurement of Young’s modulus and residual stress of thin SiC layers for MEMS high temperature applications

2012 ◽  
Vol 18 (7-8) ◽  
pp. 945-953 ◽  
Author(s):  
Oliver Pabst ◽  
Michael Schiffer ◽  
Ernst Obermeier ◽  
Tolga Tekin ◽  
Klaus Dieter Lang ◽  
...  
Keyword(s):  
Residual Stress ◽  
High Temperature ◽  
Young’S Modulus ◽  
Young's Modulus ◽  
Temperature Applications

Parabolic-Apex Numerical Back-Analysis of Mechanics Parameters of Surrounding Rock

2012 ◽  
Vol 204-208 ◽  
pp. 196-201 ◽  
Author(s):  
Jian Cong Xu ◽  
Yi Wei Xu
Keyword(s):  
Young’S Modulus ◽  
Young's Modulus ◽  
Pressure Coefficient ◽  
Back Analysis ◽  
Surrounding Rock ◽  
In Situ Monitoring ◽  
Monitoring Data ◽  
3D Fem ◽  
Physical Mechanics

The parabolic-apex numerical back-analysis method (PNBM) was proposed to obtain such physical-mechanics parameters as Young's modulus and lateral pressure coefficient of surrounding rock by 3D FEM numerical analysis based on in-situ monitoring data. Taking Xiang-an Subsea Tunnel (located in Xiamen, Fujian Province, China) for example, adopting the PNBM using ABAQUS software, three dimensional elastic-plastic FEM-PNBM of tunnel surrounding rock was validated using in-situ monitoring data. The results show as follows: Using the PNBM, not only may high calculation precision be obtained, better meeting the demand of actual projects, but also more reasonable and reliable physical mechanics indices of surrounding rock such as Young's modulus and lateral confinement pressure coefficient, may be obtained. The applicability and the simplicity of this proposed method also support its usefulness.

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