scholarly journals Planar surface-micromachined pressure sensor with a sub-surface, embedded reference pressure cavity

1996 ◽  
Author(s):  
W.P. Eaton ◽  
J.H. Smith
Keyword(s):  
Pressure Sensor ◽  
Planar Surface ◽  
Reference Pressure ◽  
Pressure Cavity

scholarly journals Improved High-Yield PMMA/Graphene Pressure Sensor and Sealed Gas Effect Analysis

Micromachines ◽  
2020 ◽  
Vol 11 (9) ◽  
pp. 786
Author(s):  
Ying Liu ◽  
Yong Zhang ◽  
Xin Lin ◽  
Ke-hong Lv ◽  
Peng Yang ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Performance Optimization ◽  
High Performance ◽  
Pressure Sensors ◽  
Pressure Change ◽  
Finite Depth ◽  
High Yield ◽  
Through Hole ◽  
Gas Effect ◽  
Pressure Cavity

Graphene with atomic thickness possesses excellent mechanical and electrical properties, which hold great potential for high performance pressure sensing. The exposed electron of graphene is always cross-sensitive to any pollution absorbed or desorbed on the surface, from which the long-term stability of the graphene pressure sensor suffers a lot. This is one of the main obstacles towards graphene commercial applications. In this paper, we utilized polymethylmethacrylate (PMMA)/graphene heterostructure to isolate graphene from the ambient environment and enhance its strength simultaneously. PMMA/graphene pressure sensors, with the finite-depth cavities and the through-hole cavities separately, were made for comparative study. The through-hole device obtained a comparable sensitivity per unit area to the state of the art of the bare graphene pressure sensor, since there were no leaking cracks or defects. Both the sensitivity and stability of the through-hole sensor are better than those of the sensor with 285-nm-deep cavities, which is due to the sealed gas effect in the pressure cavity. A modified piezoresistive model was derived by considering the pressure change of the sealed gas in the pressure cavity. The calculated result of the new model is consistent with the experimental results. Our findings point out a promising route for performance optimization of graphene pressure sensors.

scholarly journals DEVICE FOR CHECKING AND CALIBRATING INDICATORS OF THE RESERVE TIME OF CONSCIOUSNESS PRESERVATION BY A PERSON IN CONDITIONS OF HYPOXIA

2021 ◽  
pp. 245-247
Author(s):  
Н.А. Марков
Keyword(s):  
High Altitude ◽  
Pressure Sensor ◽  
Barometric Pressure ◽  
Special Device ◽  
Pressure Regulator ◽  
Emergency Situations ◽  
Reference Pressure ◽  
Reserve Time

Для обеспечения надежного функционирования индикаторов резервного времени сохранения сознания человеком в условиях гипоксии разработан специальный прибор для их поверки и калибровки. Прибор включает регулятор давления, табло для индикации эталонного давления, табло для индикации резервного времени сохранения сознания, шланг с разъемом для соединения с датчиком барометрического давления, компрессор, регулятор давления и микропроцессор. Разработанный прибор обеспечивает возможность контроля работоспособности средств коллективного и индивидуального информирования экипажа пассажиров воздушных судов о величине предельного резервного времени сохранения сознания в чрезвычайных ситуациях высотных полетов. To ensure the reliable functioning of the indicators of the reserve time of consciousness preservation by a person in conditions of hypoxia, a special device for their verification and calibration has been developed. The device includes a pressure regulator, a tableau for indicating the reference pressure, a tableau for indicating the standby time of consciousness, a hose with a connector for connecting to the barometric pressure sensor, a compressor, a pressure regulator and a microprocessor. The developed device provides the ability to monitor the performance of the means of collective and individual informing the crew of aircraft passengers about the value of the maximum reserve time for maintaining consciousness in emergency situations of high-altitude flights.

Design and Fabrication of an Improved MEMS-Based Piezoresistive Pressure Sensor

2012 ◽  
Vol 482-484 ◽  
pp. 318-321 ◽  
Author(s):  
Zi Jun Song ◽  
Xiang Wang ◽  
Yan Li ◽  
Hai Sheng San ◽  
Yu Xi Yu
Keyword(s):  
Pressure Sensor ◽  
Bridge Circuit ◽  
Wheatstone Bridge ◽  
Lower Surface ◽  
Harsh Environment ◽  
Test Results ◽  
Ansys Software ◽  
Piezoresistive Pressure Sensor ◽  
Mems Technology ◽  
Pressure Cavity

An improved piezoresistive pressure sensor is designed for harsh environment application. The highlight of this design is that the Wheatstone bridge circuit is put in lower surface of pressure diaphragm and sealed in the vacuum pressure cavity. The bridge circuit is led out by embedded Al electrodes on bonding surface. ANSYS software has been used to analyze the stress distribution of the diaphragm. By using the MEMS technology, the pressure sensor with the dimension of 1.5mm×1.5mm×500µm is fabricated. The performance of piezoresistive pressure sensor, including output, sensitivity, and nonlinearity, are investigated. The test results show that sensitivity is 20mV/V-MPa and maximum nonlinearity is 2.73%, which meet the requirements for the modern industry.

Noninvasive Monitoring of Arterial Viscoelastic Indices Using a Foil-type Pressure Sensor

2011 ◽  
Vol 131 (9) ◽  
pp. 1518-1527
Author(s):  
Hiromi Maruyama ◽  
Harutoyo Hirano ◽  
Abdugheni Kutluk ◽  
Toshio Tsuji ◽  
Osamu Fukuda ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Noninvasive Monitoring ◽  
Type Pressure

Pressure Sensor Monolithically Integrating MEMS and CMOS-LSI with CMOS Compatible “Back-end-of-line MEMS processes”

2010 ◽  
Vol 130 (5) ◽  
pp. 170-175
Author(s):  
Tsukasa Fujimori ◽  
Hideaki Takano ◽  
Yuko Hanaoka ◽  
Yasushi Goto
Keyword(s):  
Pressure Sensor ◽  
Cmos Compatible

Metal Strain Gauge Pressure Sensor Using SiO2/Si3N4 Diaphragm

2019 ◽  
Vol 139 (4) ◽  
pp. 63-68
Author(s):  
Hiroshi Nakano ◽  
Masahiro Matsumoto ◽  
Yasuo Onose ◽  
Kazuhiro Ohta
Keyword(s):  
Pressure Sensor ◽  
Strain Gauge ◽  
Gauge Pressure ◽  
Metal Strain

INNOVATIVE FOOT PRESSURE SENSOR DESIGN FOR HUMANOID ROBOTS

2019 ◽  
Author(s):  
FRANCISCO ARTHUR BONFIM AZEVEDO ◽  
Daniela Vacarini de Faria ◽  
Marcos Maximo ◽  
Mauricio Donadon
Keyword(s):  
Pressure Sensor ◽  
Humanoid Robots ◽  
Sensor Design ◽  
Foot Pressure
Sign in / Sign up

Export Citation Format

Share Document