scholarly journals Elastic Properties of Thin Film Silicon: Final Report; 1 June 1999--23 August 2002

2003 ◽  
Author(s):  
R O Pohl
Keyword(s):  
Thin Film ◽  
Elastic Properties ◽  
Final Report ◽  
Thin Film Silicon

The elastic properties of thin-film silicon nitride

2002 ◽  
Author(s):  
T.S. Hickernell ◽  
F.M. Fliegel ◽  
F.S. Hickernell
Keyword(s):  
Thin Film ◽  
Silicon Nitride ◽  
Elastic Properties ◽  
Thin Film Silicon

Leakage current models of thin film silicon-on-insulator devices

1998 ◽  
Vol 72 (10) ◽  
pp. 1199-1201 ◽  
Author(s):  
Hank Shin ◽  
Stella Hong ◽  
Tom Wetteroth ◽  
Syd R. Wilson ◽  
Dieter K. Schroder
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Silicon On Insulator ◽  
Thin Film Silicon
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