Total Effluent Treatment and Rinse Water Reclamation in a Semiconductor Device Manufacturing Facility
Keyword(s):
Case history of a total rinse water reclamation system operating in a semiconductor manufacturing facility. Utilizing the latest technologies, over 90% of the rinse water is purified back to 18 megohm/cm quality for reuse, and the concentrated toxic chemicals are precipitated and disposed of as an insoluble sludge. Based on a maximum rinse water flow of 72,000 gallons per day, the total operating cost is $251. 31/day.
Keyword(s):
Keyword(s):
2011 ◽
Vol 2011
(1)
◽
pp. 000382-000387
2013 ◽
Vol 51
(16-18)
◽
pp. 3138-3144
◽
1996 ◽
Vol 42
◽
pp. 173-189
2009 ◽
Vol 15
(2)
◽
pp. 179-184
◽
2014 ◽
Vol 15
(1)
◽
pp. 101-106
◽
Keyword(s):