scholarly journals Dynamics simulation of microelectromechanical electrostatic actuator incorporating the squeeze-film damping effect

2017 ◽  
Vol 19 (1) ◽  
pp. 657-664
Author(s):  
Chin-Chia Liu
Keyword(s):  
Dynamics Simulation ◽  
Squeeze Film ◽  
Electrostatic Actuator ◽  
Damping Effect ◽  
Squeeze Film Damping

Squeeze film damping effect on the dynamic response of a MEMS torsion mirror

1998 ◽  
Vol 8 (3) ◽  
pp. 200-208 ◽  
Author(s):  
Feixia Pan ◽  
Joel Kubby ◽  
Eric Peeters ◽  
Alex T Tran ◽  
Subrata Mukherjee
Keyword(s):  
Dynamic Response ◽  
Squeeze Film ◽  
Damping Effect ◽  
Squeeze Film Damping

scholarly journals Squeeze Film Damping Effect on Different Microcantilever Probes in Tapping Mode Atomic Force Microscope

Scanning ◽  
2020 ◽  
Vol 2020 ◽  
pp. 1-6
Author(s):  
Yan Sun ◽  
Jing Liu ◽  
Kejian Wang ◽  
Zheng Wei
Keyword(s):  
Atomic Force Microscope ◽  
Theoretical Models ◽  
Sample Surface ◽  
Squeeze Film ◽  
Simplified Models ◽  
Tapping Mode ◽  
Damping Effect ◽  
Atomic Force ◽  
Squeeze Film Damping

During the operation of tapping mode atomic force microscope (TM-AFM), the gap between the cantilever and sample surface is very small (several nanometers to micrometers). Owing to the small gap distance and high vibration frequency, squeeze film force should be considered in TM-AFM. To explore the mechanism of squeeze film damping in TM-AFM, three theoretical microcantilever simplified models are discussed innovatively herein: tip probe, ball probe, and tipless probe. Experiments and simulations are performed to validate the theoretical models. It is of great significance to improve the image quality of atomic force microscope.

Investigation of Squeeze Film Damping and Associated Loads

2017 ◽  
Author(s):  
Per Johansen ◽  
Niels C. Bender ◽  
Anders H. Hansen ◽  
Lasse Schmidt
Keyword(s):  
Squeeze Film ◽  
Design Parameters ◽  
Impact Loads ◽  
Fast Switching ◽  
Damping Effect ◽  
Squeeze Film Damping ◽  
Inherent Feature ◽  
Pressure Dependency ◽  
Gap Height ◽  
The Impact

Digital hydraulics have attracted attention towards fast switching valves and the increased focus on reliable fluid power entail that the lifetime of such valves is of great concern. An inherent feature of most valves for digital hydraulics is that of a mechanical end stop. Consequently, the squeeze film damping associated with end stops of switching valves is an interesting topic. This damping effect is perceived as beneficial for high lifetime and low impact sound, as the consequence of lowering the impact velocity at the mechanical end stops. In this paper the squeeze film damping effect is reviewed with a focus on maximum surface stresses. Using the Barus relation for viscosity-pressure dependency and different film geometries, the classical lubrication theory is applied together with the equation of motion, to obtain the gap height motion equation, both for the iso-viscous and piezo-viscous case. In consequence, this enable insights concerning the influence of piezo-viscosity on this damping effect. These models are used to investigate the loads, which the approaching surfaces experiences. Based on Hertzian theory, comparisons of impact loads and the dynamic squeeze loading are performed, whereby the relation between design parameters and the relative severity of these occurrences are analyzed.

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