FEM Modeling of Squeeze Film Damping Effect in RF-MEMS Switches

2017 ◽  
Vol 4 (1) ◽  
Author(s):  
Syed Turab Haider ◽  
Muhammad Mubasher Saleem ◽  
Mashhood Ahmad
Keyword(s):  
Rf Mems ◽  
Squeeze Film ◽  
Fem Modeling ◽  
Mems Switches ◽  
Damping Effect ◽  
Squeeze Film Damping ◽  
Rf Mems Switches

scholarly journals Control of Bouncing in MEMS Switches Using Double Electrodes

2016 ◽  
Vol 2016 ◽  
pp. 1-10 ◽  
Author(s):  
Farhan Abdul Rahim ◽  
Mohammad I. Younis
Keyword(s):  
Microelectromechanical Systems ◽  
Rf Mems ◽  
Electrostatic Force ◽  
Squeeze Film ◽  
Beam Model ◽  
Mems Switches ◽  
Lumped Parameter ◽  
Rf Mems Switches ◽  
Double Electrode ◽  
The Galerkin Method

This paper presents a novel way of controlling the bouncing phenomenon commonly present in the Radio Frequency Microelectromechanical Systems (RF MEMS) switches using a double-electrode configuration. The paper discusses modeling bouncing using both lumped parameter and beam models. The simulations of bouncing and its control are discussed. Comparison between the new proposed method and other available control techniques is also made. The Galerkin method is applied on the beam model accounting for the nonlinear electrostatic force, squeeze film damping, and surface contact effect. The results indicate that it is possible to reduce bouncing and hence beam degradation, by the use of double electrodes.

Lifetime characterization of capacitive RF MEMS switches

2005 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Jean-Philippe Polizzi
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches

CMOS Compatible RF MEMS Switches with Serpentine Springs

2019 ◽  
Vol 18 (1) ◽  
pp. 9-14
Author(s):  
Xiao L. Evans ◽  
H.S. Gamble ◽  
P.T. Baine ◽  
S.J.N. Mitchell ◽  
J. Montgomery ◽  
...  
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Cmos Compatible

scholarly journals Lifetime characterization of capacitive power RF MEMS switches

2006 ◽  
Author(s):  
Afshin Ziaei ◽  
Thierry Dean ◽  
Yves Mancuso
Keyword(s):  
Rf Mems ◽  
Mems Switches ◽  
Rf Mems Switches
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