scholarly journals THE THERMAL OXIDATION EFFECT OF THE SINGLE CRYSTAL SILICON (100) ON THE MAGNETIC PROPERTIES OF ULTRA-THIN FILMS OF COBALT.

2018 ◽  
Vol 6 (8) ◽  
pp. 423-429
Author(s):  
AAdanlete Adjanoh. ◽  
1981 ◽  
Vol 25 ◽  
pp. 365-371
Author(s):  
Glen A. Stone

This paper presents a new method to measure the thickness of very thin films on a substrate material using energy dispersive x-ray diffractometry. The method can be used for many film-substrate combinations. The specific application to be presented is the measurement of phosphosilicate glass films on single crystal silicon wafers.


2007 ◽  
Vol 140 (2) ◽  
pp. 257-265 ◽  
Author(s):  
Hsien-Kuang Liu ◽  
B.J. Lee ◽  
Pang-Ping Liu

2011 ◽  
Vol 56 (11) ◽  
pp. 1670-1674 ◽  
Author(s):  
M. V. Gomoyunova ◽  
G. S. Grebenyuk ◽  
I. I. Pronin

2007 ◽  
Vol 30 (12) ◽  
pp. 1172-1181 ◽  
Author(s):  
X. LI ◽  
T. KASAI ◽  
S. NAKAO ◽  
T. ANDO ◽  
M. SHIKIDA ◽  
...  

Open Physics ◽  
2006 ◽  
Vol 4 (1) ◽  
pp. 105-116 ◽  
Author(s):  
Ahti Niilisk ◽  
Mart Moppel ◽  
Martti Pärs ◽  
Ilmo Sildos ◽  
Taavi Jantson ◽  
...  

AbstractThe Raman spectroscopy method was used for structural characterization of TiO2 thin films prepared by atomic layer deposition (ALD) and pulsed laser deposition (PLD) on fused silica and single-crystal silicon and sapphire substrates. Using ALD, anatase thin films were grown on silica and silicon substrates at temperatures 125–425 °C. At higher deposition temperatures, mixed anatase and rutile phases grew on these substrates. Post-growth annealing resulted in anatase-to-rutile phase transitions at 750 °C in the case of pure anatase films. The films that contained chlorine residues and were amorphous in their as-grown stage transformed into anatase phase at 400 °C and retained this phase even after annealing at 900 °C. On single crystal sapphire substrates, phase-pure rutile films were obtained by ALD at 425 °C and higher temperatures without additional annealing. Thin films that predominantly contained brookite phase were grown by PLD on silica substrates using rutile as a starting material.


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