scholarly journals Finite element modeling and simulation of a microstructure silicon beam resonant

Author(s):  
Mohamed Shaglouf ◽  
ElJaroshi Diryak ◽  
Ahmed Abugalia
2008 ◽  
Vol 47 (1) ◽  
pp. 21-28 ◽  
Author(s):  
Mattias Åström ◽  
Ludvic U. Zrinzo ◽  
Stephen Tisch ◽  
Elina Tripoliti ◽  
Marwan I. Hariz ◽  
...  

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