scholarly journals Transmission electron microscopy sample preparation protocols for the ultrastructural study of cysts of free-living protozoa

BioTechniques ◽  
2015 ◽  
Vol 58 (4) ◽  
Author(s):  
Ellen Lambrecht ◽  
Julie Baré ◽  
Myriam Claeys ◽  
Natascha Chavatte ◽  
Wim Bert ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Sample Preparation ◽  
Ultrastructural Study ◽  
Transmission Electron Microscopy Sample ◽  
Free Living ◽  
Transmission Electron

Transmission Electron Microscopy Sample Preparation By Design Based Recipe Writing in a DBFIB Part 2

2019 ◽  
Author(s):  
J. Demarest ◽  
B. Austin ◽  
J. Arjavac ◽  
M. Breton ◽  
M. Bergendahl ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Sample Preparation ◽  
Unique Feature ◽  
Sample Thickness ◽  
Transmission Electron Microscopy Sample ◽  
Transmission Electron ◽  
Placement Accuracy ◽  
2D Arrays ◽  
Scanning Electron

Abstract Demarest et al. concluded in their previous report that a ten times improvement in placement accuracy was required to enable automated transmission electron microscopy (TEM) sample preparation, and wafer alignment by GDS coordinates demonstrated a factor of two improvement in comparison to optical or scanning electron microscope based processes. This paper provides an additional update on this project. The study is about a GDS based process developed to simplify the complicated workflow for examining discrete electrical failures. The results of this study indicated that the recipe prototype developed on a test structure had a unique feature that consisted of an approximately 45nm by 200nm Cu line segment. Executing the prototype recipe on a wafer at the same process point fabricated 6 months after the original wafer yielded four identical successful samples of about 30nm sample thickness. This technique can thus be extended to large 2D arrays of small structures.

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