Modeling and Step-size Prediction of A Galfenol Driven Ultra-Precision Linear Motor

2016 ◽  
Keyword(s):  
Linear Motor ◽  
Step Size ◽  
Ultra Precision

Ultra-Precision Linear Motor Positioning Technique

1991 ◽  
Vol 3 (4) ◽  
pp. 328-333 ◽  
Author(s):  
Masanori Suematsu ◽  
◽  
Takao Fujii ◽  
Atsushi Kawahara ◽  
Tomoaki Tanimoto ◽  
...  
Keyword(s):  
Temperature Rise ◽  
Normal Force ◽  
Servo System ◽  
Linear Motor ◽  
Pulse Velocity ◽  
Air Bearing ◽  
Positioning Accuracy ◽  
Support Mechanism ◽  
Ultra Precision ◽  
Positioning Technique

This paper introduces an ultra-precision linear motor positioning technique. In order to realize a compact positioning movement without dual structure consisting coarse and fine positionings, higher accuracy air slider studies are conducted on a completely frictionless support mechanism using a linear motor and an externally pressurized air bearing. Results are as follows: (1) Temperature rise of 03°C, table displacement of 0.16μm and guide warp of 0.03μm are achieved by slider guide with adiabatic structure. (2) To reduce cogging force and normal force, coreless and slotless motor is developed. Thrust ripple has reduced to less than 2 % of the rated thrust. (3) Maximum pulse velocity of 10 Mpps, acceleration of 3M/S2, 0.2 sec for 15mm stroke are achieved. (4) Software servo system using DSP is adopted, positioning accuracy of 10nm are achieved without fine positioning.

scholarly journals Sub-Nanometer Positioning Combining New Linear Motor with Linear Motion Ball Guide Ways

2009 ◽  
Vol 3 (3) ◽  
pp. 241-248
Author(s):  
Jiro Otsuka ◽  
◽  
Toshiharu Tanaka ◽  
Ikuro Masuda ◽  
◽  
...  
Keyword(s):  
Permanent Magnets ◽  
Linear Motor ◽  
General Motors ◽  
Step Response ◽  
Precision Positioning ◽  
Positioning Device ◽  
Ultra Precision ◽  
New Type ◽  
Force Ripple ◽  
Flux Leakage

A new type of linear motor described in this paper has some advantages compared with the usual types of motors. The attractive magnetic force between the stator (permanent magnets) and mover (armature) is diminished almost to zero. The efficiency is better because the magnetic flux leakage is very small, the size of motor is smaller and detent (force ripple) is smaller than the general motors. Therefore, we think that this motor is greatly suitable for ultra-precision positioning as an actuator. An ultra-precision positioning device using this motor and liner motion ball guide ways is newly developed. Moreover, the positioning performance is evaluated by a positioning resolution, deviational and dispersion errors. As the results of repeated step response tests, the positioning resolution is 0.3 nm, the deviational error is -0.001nm and the dispersion error (3σ) is 0.29 nm. Consequently, the positioning device achieves sub-nanometer positioning. In addition, very large rigidity can be achieved.

Design of decoupled dual servo stage with voice coil motor and linear motor for XY long stroke ultra-precision scanning system

2005 ◽  
Author(s):  
Ki-Hyun Kim ◽  
Young-Man Choi ◽  
Dae-Gab Gweon ◽  
Dong-Pyo Hong ◽  
Koung-Suk Kim ◽  
...  
Keyword(s):  
Voice Coil Motor ◽  
Linear Motor ◽  
Scanning System ◽  
Ultra Precision ◽  
Long Stroke

scholarly journals 5-axis Ultra Precision Nano Machine Tool by Means of Linear Motor Drive

2006 ◽  
Vol 72 (4) ◽  
pp. 435-439 ◽  
Author(s):  
Tomohiko KAWAI ◽  
Kenzo EBIHARA ◽  
Akira YAMAMOTO
Keyword(s):  
Machine Tool ◽  
Linear Motor ◽  
Motor Drive ◽  
Ultra Precision

scholarly journals Development of ultra-precision positioning technique with linear motor.

1990 ◽  
Vol 56 (10) ◽  
pp. 1829-1834
Author(s):  
Masanori SUEMATSU ◽  
Takao FUJII ◽  
Atsushi KAWAHARA ◽  
Tomoaki TANIMOTO ◽  
Toshio MATSUMOTO ◽  
...  
Keyword(s):  
Linear Motor ◽  
Precision Positioning ◽  
Ultra Precision ◽  
Positioning Technique

Development of High-Acceleration and Ultra-Precision Linear Motor Driven Machining Center and its Characteristics

2010 ◽  
Vol 4 (5) ◽  
pp. 454-459 ◽  
Author(s):  
Kazuo Nakamoto ◽  
◽  
Shinichi Matsumoto ◽  
Masahiro Anzai ◽  
Keyword(s):  
High Precision ◽  
High Efficiency ◽  
Linear Motor ◽  
Measuring System ◽  
Machining Center ◽  
Hydrostatic Bearings ◽  
High Acceleration ◽  
Ultra Precision

We have developed machining centers, equipped with damping mechanism, for precision molds, which can not only suppress vibrations during high-acceleration driving of the machine but also perform high-precision and high-efficiency machining in micro regions. We have also achieved automatic exchanges of tools by employing ultrafast rotating main shafts with air hydrostatic bearings and automatic shrinkage fitting methods, as well as we have realized automated operations of the machine by integrating work with tool-measuring system.

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