Design of decoupled dual servo stage with voice coil motor and linear motor for XY long stroke ultra-precision scanning system

2005 ◽  
Author(s):  
Ki-Hyun Kim ◽  
Young-Man Choi ◽  
Dae-Gab Gweon ◽  
Dong-Pyo Hong ◽  
Koung-Suk Kim ◽  
...  
Keyword(s):  
Voice Coil Motor ◽  
Linear Motor ◽  
Scanning System ◽  
Ultra Precision ◽  
Long Stroke

Structure Design of Large Travel One-Arm Bridge Type Z-Axis Nano-Positioning Stage

2015 ◽  
Vol 645-646 ◽  
pp. 1064-1071
Author(s):  
Wei Fan ◽  
Zhong Shen Li ◽  
Shao Yin Jiang
Keyword(s):  
Structure Design ◽  
System Structure ◽  
Scanning System ◽  
Positioning Stage ◽  
Ultra Precision ◽  
Bridge Type ◽  
Abbe Error ◽  
Designing Method ◽  
Scanning Motion ◽  
Control Accuracy

In some areas such as micro-mechanical, ultra-precision machining, nanotechnology, the high-precision positioning and very fine vertical scanning motion are needed urgently. Therefore, the Z-axis micro-displacement driving control technology has become the key technology in these areas. The piezoelectric ceramics actuator and stepper motor were integrated into hybrid linear actuator in Z-axis nanopositioning stage, and this can simplify the structure of the drive system. By calculating the gravity center of the vertical scanning system, and using single counterweight, a new one-arm bridge type structure was built. Appropriate tension and current sensors were also equipped in order to real-time monitor the drive status. It is feasible to balance the weight with this simplified system structure, and also guarantee the driving control accuracy of nanopositioning stage. Besides, in the structural design, the Abbe error can be reduced greatly by placing the stage center, grating ruler and displacement measurement centerline on the same line with grating reading head. The driving travel of nanopositioning stage is 150mm, and driving resolution is 1nm. The designing method introduced gives a scientific method and practical reference for the development of z-axis driving control system.

Ultra-Precision Linear Motor Positioning Technique

1991 ◽  
Vol 3 (4) ◽  
pp. 328-333 ◽  
Author(s):  
Masanori Suematsu ◽  
◽  
Takao Fujii ◽  
Atsushi Kawahara ◽  
Tomoaki Tanimoto ◽  
...  
Keyword(s):  
Temperature Rise ◽  
Normal Force ◽  
Servo System ◽  
Linear Motor ◽  
Pulse Velocity ◽  
Air Bearing ◽  
Positioning Accuracy ◽  
Support Mechanism ◽  
Ultra Precision ◽  
Positioning Technique

This paper introduces an ultra-precision linear motor positioning technique. In order to realize a compact positioning movement without dual structure consisting coarse and fine positionings, higher accuracy air slider studies are conducted on a completely frictionless support mechanism using a linear motor and an externally pressurized air bearing. Results are as follows: (1) Temperature rise of 03°C, table displacement of 0.16μm and guide warp of 0.03μm are achieved by slider guide with adiabatic structure. (2) To reduce cogging force and normal force, coreless and slotless motor is developed. Thrust ripple has reduced to less than 2 % of the rated thrust. (3) Maximum pulse velocity of 10 Mpps, acceleration of 3M/S2, 0.2 sec for 15mm stroke are achieved. (4) Software servo system using DSP is adopted, positioning accuracy of 10nm are achieved without fine positioning.

scholarly journals Sub-Nanometer Positioning Combining New Linear Motor with Linear Motion Ball Guide Ways

2009 ◽  
Vol 3 (3) ◽  
pp. 241-248
Author(s):  
Jiro Otsuka ◽  
◽  
Toshiharu Tanaka ◽  
Ikuro Masuda ◽  
◽  
...  
Keyword(s):  
Permanent Magnets ◽  
Linear Motor ◽  
General Motors ◽  
Step Response ◽  
Precision Positioning ◽  
Positioning Device ◽  
Ultra Precision ◽  
New Type ◽  
Force Ripple ◽  
Flux Leakage

A new type of linear motor described in this paper has some advantages compared with the usual types of motors. The attractive magnetic force between the stator (permanent magnets) and mover (armature) is diminished almost to zero. The efficiency is better because the magnetic flux leakage is very small, the size of motor is smaller and detent (force ripple) is smaller than the general motors. Therefore, we think that this motor is greatly suitable for ultra-precision positioning as an actuator. An ultra-precision positioning device using this motor and liner motion ball guide ways is newly developed. Moreover, the positioning performance is evaluated by a positioning resolution, deviational and dispersion errors. As the results of repeated step response tests, the positioning resolution is 0.3 nm, the deviational error is -0.001nm and the dispersion error (3σ) is 0.29 nm. Consequently, the positioning device achieves sub-nanometer positioning. In addition, very large rigidity can be achieved.

Modeling and Control of Ultra Precision Positioning System for a Grating Ruling Machine

2011 ◽  
Vol 110-116 ◽  
pp. 2647-2654
Author(s):  
Yuan Shen ◽  
Dong Cai Liu ◽  
Guo Fu Lian ◽  
Jie Guo ◽  
Chan Gan Zhu
Keyword(s):  
Hybrid Control ◽  
System Modeling ◽  
Positioning System ◽  
Precision Positioning ◽  
Positional Accuracy ◽  
Modeling And Control ◽  
Control Scheme ◽  
Positioning Stage ◽  
Ultra Precision ◽  
Long Stroke

This paper presents a system modeling based control scheme of an ultra precision positioning system for a grating ruling machine. Since the positioning system having a long stroke with ultra precision, the positioning system consists of a coarse positioning stage driven by a servo motor and a fine positioning stage driven by a piezoelectric ceramic. In order to improve positional accuracy and remove the noise components of motion, a hybrid control scheme based on the system modeling is implemented. Considering position-dependent and time-dependent behaviors of the stages, a model based LQ controller is utilized to the coarse stage and a PID feedback controller based on neural network is utilized to the fine stage. Experiment results reveal the efficient and robust of the control scheme and show that the positional accuracy has been readily achieved within 8.6 nm.

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