High Vacuum Evaporation System.

1996 ◽  
Author(s):  
Manijeh Razeghi
Keyword(s):  
High Vacuum ◽  
Vacuum Evaporation

High-Vacuum Evaporation of n-CuIn3Se5 Photoabsorber Films for Hybrid PV Structures

2011 ◽  
Vol 40 (12) ◽  
pp. 2374-2381 ◽  
Author(s):  
N. Adhikari ◽  
S. Bereznev ◽  
K. Laes ◽  
J. Kois ◽  
O. Volobujeva ◽  
...  
Keyword(s):  
High Vacuum ◽  
Vacuum Evaporation

Shadow Edge Lithography and Application to Nanofluidics

2010 ◽  
Author(s):  
Woon-Hong Yeo ◽  
Dong Won Lee ◽  
Kyong-Hoon Lee ◽  
Jae-Hyun Chung
Keyword(s):  
Fuel Cells ◽  
High Resolution ◽  
High Throughput ◽  
Single Molecule ◽  
Chemical Sensors ◽  
Geometric Distribution ◽  
High Vacuum ◽  
Vacuum Evaporation ◽  
Wafer Scale ◽  
Nanoscale Patterns

Many upcoming applications, such as nanoelectronic circuitry, single-molecule based chips, nanofluidics, chemical sensors, and fuel cells, require large arrays of nanochannels and nanowires. To commercialize such nanostructured devices, a high resolution and high throughput patterning method is essential. For this purpose, we developed the shadow edge lithography (SEL) as a wafer-scale, high-throughput nanomanufacturing method [1]. In the proposed method, the shadow effect in the high-vacuum evaporation was theoretically analyzed to predict the geometric distribution of the nanoscale patterns [2]. In experiment, nanoscale patterns were created by the shadow of aluminum (Al) edges that were prepatterned using a conventional microfabrication method.

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