RF Vacuum Microelectronics

1993 ◽  
Author(s):  
David S. Komm
Keyword(s):  
Vacuum Microelectronics

scholarly journals Formation of carbon nanoscale elements of vacuum microelectronics by plasma treatment of SiC

2020 ◽  
Vol 1695 ◽  
pp. 012028
Author(s):  
A A Rezvan ◽  
I N Kots ◽  
R V Tominov ◽  
V S Klimin ◽  
O A Ageev
Keyword(s):  
Plasma Treatment ◽  
Vacuum Microelectronics

Surface Modification of Si Field Emitter Arrays for Vacuum Sealing

2000 ◽  
Vol 621 ◽  
Author(s):  
M. Nagao ◽  
H. Tanabe ◽  
T. Kobayashi ◽  
T. Matsukawa ◽  
S. Kanemaru ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Vacuum Packaging ◽  
Field Emitter ◽  
Vacuum Sealing ◽  
Field Emitter Arrays ◽  
Vacuum Microelectronics ◽  
Field Emission Displays ◽  
Before And After ◽  
Heating Treatment ◽  
Field Emitter Array

ABSTRACTVacuum packaging is a very important issue for vacuum microelectronics devices, especially for field emission displays. Emission current from the field emitter array (FEA), however, is known to decrease significantly after the vacuum packaging process. The current decrease is caused by heating treatment in the vacuum sealing process. In the present paper, the effect of the heating treatment on Si FEA was investigated and CHF3 plasma treatment was proposed for avoiding the problem. The Si FEA was exposed to plasma for 15sec and emission characteristics were measured before and after the vacuum sealing process using frit. It was confirmed that CHF3 plasma treatment was very effective for avoiding the emission degradation of the Si FEA. Details of the heating damage and CHF3 plasma treatment are described.

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