Thin-Film Diffusion Barriers for Metal-Semiconductor Contacts,

1987 ◽  
Author(s):  
M-A. Nicolet
Keyword(s):  
Thin Film ◽  
Diffusion Barriers ◽  
Film Diffusion ◽  
Semiconductor Contacts ◽  
Thin Film Diffusion

Failure mechanisms of TiN thin film diffusion barriers

1988 ◽  
Vol 164 ◽  
pp. 417-428 ◽  
Author(s):  
N. Kumar ◽  
K. Pourrezaei ◽  
B. Lee ◽  
E.C. Douglas
Keyword(s):  
Thin Film ◽  
Failure Mechanisms ◽  
Diffusion Barriers ◽  
Film Diffusion ◽  
Thin Film Diffusion

Cosputtered W75C25 thin film diffusion barriers

1988 ◽  
Vol 158 (1) ◽  
pp. 45-50 ◽  
Author(s):  
Hwa-Yueh Yang ◽  
X.-A. Zhao ◽  
M.-A. Nicolet
Keyword(s):  
Thin Film ◽  
Diffusion Barriers ◽  
Film Diffusion ◽  
Thin Film Diffusion

Amorphous thin film diffusion barriers on GaAs and InP

1983 ◽  
Vol 104 (1-2) ◽  
pp. 57-67 ◽  
Author(s):  
W.T. Anderson ◽  
A. Christou ◽  
J.E. Davey
Keyword(s):  
Thin Film ◽  
Diffusion Barriers ◽  
Film Diffusion ◽  
Amorphous Thin Film ◽  
Thin Film Diffusion
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