scholarly journals ZnO thin-film transistor grown by rf sputtering using Zn metal target and oxidizer pulsing

2017 ◽  
Vol 125 (3) ◽  
pp. 112-117 ◽  
Author(s):  
Dukyean YOO ◽  
Wonjin JEON ◽  
Junghwan KIM ◽  
Jun MENG ◽  
Youjung YANG ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistor ◽  
Rf Sputtering ◽  
Zno Thin Film ◽  
Metal Target

scholarly journals ZnO Thin-Film Transistor Grown by rf Sputtering Using Carbon Dioxide and Substrate Bias Modulation

2014 ◽  
Vol 2014 ◽  
pp. 1-7 ◽  
Author(s):  
Junghwan Kim ◽  
Jun Meng ◽  
Donghoon Lee ◽  
Meng Yu ◽  
Dukyean Yoo ◽  
...  
Keyword(s):  
Thin Film ◽  
Carbon Dioxide ◽  
Thin Film Transistor ◽  
Rf Sputtering ◽  
Rf Magnetron Sputtering ◽  
Substrate Bias ◽  
Zno Thin Film ◽  
The Poor ◽  
Dc Bias ◽  
Bottom Gate

ZnO thin-film transistor (TFT) grown by rf magnetron sputtering in Ar/O2atmosphere shows inferior turn-off characteristics compared to ZnO TFT grown by other methods. We thought that reactions between Zn and O2might produce defects responsible for the poor turn-off behavior. In order to solve this problem, we studied sputtering growth in Ar/CO2atmosphere at 450°C. During sputtering growth, we modulated substrate dc bias to control ion supply to the substrate. After growth ZnO was annealed in CO2and O2gas. With these methods, our bottom-gate ZnO thin-film transistor showed 4.7 cm2/Vsec mobility,4×106on/off ratio, and –2 V threshold voltage.

Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering

2003 ◽  
Vol 82 (7) ◽  
pp. 1117-1119 ◽  
Author(s):  
P. F. Carcia ◽  
R. S. McLean ◽  
M. H. Reilly ◽  
G. Nunes
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Thin Film Transistor ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Film

Bias Stress Stability of Electric-double-layer ZnO Thin-film Transistor

2022 ◽  
Vol 43 (01) ◽  
pp. 129-136
Author(s):  
Cong WANG ◽  
◽  
Yu-rong LIU ◽  
Qiang PENG ◽  
He HUANG ◽  
...  
Keyword(s):  
Thin Film ◽  
Double Layer ◽  
Electric Double Layer ◽  
Thin Film Transistor ◽  
Zno Thin Film ◽  
Bias Stress

Coplanar ZnO Thin-Film Transistor Using Boron Ion Doped Source/Drain Contacts

2009 ◽  
Vol 12 (10) ◽  
pp. J93 ◽  
Author(s):  
Christophe Avis ◽  
Se Hwan Kim ◽  
Ji Ho Hur ◽  
Jin Jang ◽  
W. I. Milne
Keyword(s):  
Thin Film ◽  
Thin Film Transistor ◽  
Zno Thin Film

The improved performance of a transparent ZnO thin-film transistor with AlN/Al2O3double gate dielectrics

2009 ◽  
Vol 24 (5) ◽  
pp. 055008 ◽  
Author(s):  
Jung-Min Lee ◽  
Byung-Hyun Choi ◽  
Mi-Jung Ji ◽  
Jung-Ho Park ◽  
Jae-Hong Kwon ◽  
...  
Keyword(s):  
Thin Film ◽  
Gate Dielectrics ◽  
Thin Film Transistor ◽  
Zno Thin Film ◽  
Improved Performance

High-performance ZnO thin-film transistor fabricated by atomic layer deposition

2011 ◽  
Vol 26 (8) ◽  
pp. 085007 ◽  
Author(s):  
Byeong-Yun Oh ◽  
Young-Hwan Kim ◽  
Hee-Jun Lee ◽  
Byoung-Yong Kim ◽  
Hong-Gyu Park ◽  
...  
Keyword(s):  
Thin Film ◽  
Atomic Layer Deposition ◽  
High Performance ◽  
Thin Film Transistor ◽  
Atomic Layer ◽  
Zno Thin Film ◽  
Layer Deposition

Carrier concentration-dependent piezotronic and piezo-phototronic effects in ZnO thin-film transistor

Nano Energy ◽  
2018 ◽  
Vol 49 ◽  
pp. 529-537 ◽  
Author(s):  
Zijian Pan ◽  
Wenbo Peng ◽  
Fangpei Li ◽  
Yongning He
Keyword(s):  
Thin Film ◽  
Carrier Concentration ◽  
Thin Film Transistor ◽  
Zno Thin Film

Numerical study on the dependence of ZnO thin-film transistor characteristics on grain boundary position

2011 ◽  
Vol 20 (5) ◽  
pp. 057201 ◽  
Author(s):  
An Zhang ◽  
Xiao-Ru Zhao ◽  
Li-Bing Duan ◽  
Jin-Ming Liu ◽  
Jian-Lin Zhao
Keyword(s):  
Thin Film ◽  
Grain Boundary ◽  
Numerical Study ◽  
Thin Film Transistor ◽  
Zno Thin Film ◽  
Boundary Position
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