Development of Flexible Inserter for IC Chip Testing

2001 ◽  
Vol 13 (3) ◽  
pp. 289-293
Author(s):  
Toshihiro Taguchi ◽  
Keyword(s):  
Force Control ◽  
Manufacturing Process ◽  
Semiconductor Manufacturing ◽  
Position Control ◽  
Electrical Characteristics ◽  
Pressing Force ◽  
Passive Compliance ◽  
Last Stage ◽  
Ic Testing ◽  
Chip Testing

In the last stage of semiconductor manufacturing process, IC is inserted in the testing equipment for many kinds of electrical characteristics test. But the use of position control causes many problems such as shortage or overdose of pressing force, the non-uniformity of pressing force, and the shoulder touch phenomenon of IC pressing etc. Thus the testing process with stable and flexibly efficient handler is desired. In this paper, focusing on IC packages such as BGA and CSP, the development of flexible inserter for IC testing based on force control and with a new passive compliance unit (PCU) is reported to improve testing throughput drastically.

Sensorless Force Control for High-speed Pressurization

2001 ◽  
Vol 13 (3) ◽  
pp. 222-229
Author(s):  
Shigeyasu Kawaji ◽  
◽  
Fuminori Ozaki ◽  
Ryutaro Higashi ◽  
Keyword(s):  
Force Control ◽  
Semiconductor Manufacturing ◽  
Disturbance Observer ◽  
High Speed ◽  
Position Control ◽  
Piecewise Polynomial ◽  
Speed Sensorless ◽  
Model Following ◽  
Ic Testing ◽  
Key Techniques

Force control technology needs a breakthrough to be used for practical purposes because it is rarely used in the industry although it is being improved in academic circles. We propose solving problems of conventional position control in pressurization using high-speed sensorless force control for the IC testing handler used in semiconductor manufacturing. The key techniques to solve the problem are piecewise polynomial trajectory generation to meet needs for high-speed operation, a model-following force servo to achieve pressurizing conditions, and a disturbance observer to estimate pressurization. The effectiveness of the proposed method is confirmed in experiments.

Robotic Instrumented Complaint Wrist

1992 ◽  
Vol 114 (1) ◽  
pp. 120-123 ◽  
Author(s):  
Yangsheng Xu ◽  
R. P. Paul
Keyword(s):  
Force Control ◽  
Position Control ◽  
Contact Forces ◽  
Displacement Sensor ◽  
Robot Arm ◽  
Sensing Mechanism ◽  
Manufacturing Operations ◽  
Positioning Errors ◽  
Control Scheme ◽  
Passive Compliance

A robotic complaint wrist which combines a passive compliance device and a displacement sensor has been developed and tested. The device provides the necessary flexibility to accommodate transitions between the position control and force control modes, and avoid large impact forces as a robot makes contact with parts, as well as correct positioning errors and allow the relaxation of tolerances in assembly and manufacturing operations. The device installed between a robot arm and end-effector is composed of two parts: a passive compliance device and a sensing mechanism. The passive compliance is provided by a rubber structure; its configuration can be arranged to yield the desired stiffness ratio along and about each axis. The sensing mechanism consists of a six-joint serial linkage with a transducer at each point. The measured deflection is used to actively control the contact forces and compensate for the positioning error during motion and contact. In this paper, the design features of two prototypes of the device are described. A systematic hybrid position/force control scheme incorporating the device is presented.

NanoProbing on 7 nm FinFET Devices in an SRAM Array: Challenges and Solutions

2019 ◽  
Author(s):  
Anqi Qiu ◽  
William Lowe ◽  
Mridul Arora
Keyword(s):  
Manufacturing Process ◽  
Semiconductor Manufacturing

Abstract Nanoprobing systems have evolved to meet the challenges from recent innovations in the semiconductor manufacturing process. This is demonstrated through an exhibition of standard SRAM measurements on TSMC 7 nm FinFET technology. SEM based nanoprober is shown to meet or exceed the requirements for measuring 7nm technology and beyond. This paper discusses in detail of the best-known methods for nanoprobing on 7nm technology.

scholarly journals Neural Network Based Contact Force Control Algorithm for Walking Robots

Sensors ◽  
2021 ◽  
Vol 21 (1) ◽  
pp. 287
Author(s):  
Byeongjin Kim ◽  
Soohyun Kim
Keyword(s):  
Neural Network ◽  
Contact Force ◽  
Force Control ◽  
Control Algorithm ◽  
Position Control ◽  
Linear Quadratic Regulator ◽  
Walking Robots ◽  
Test Model ◽  
Linear Quadratic ◽  
Contact Force Control

Walking algorithms using push-off improve moving efficiency and disturbance rejection performance. However, the algorithm based on classical contact force control requires an exact model or a Force/Torque sensor. This paper proposes a novel contact force control algorithm based on neural networks. The proposed model is adapted to a linear quadratic regulator for position control and balance. The results demonstrate that this neural network-based model can accurately generate force and effectively reduce errors without requiring a sensor. The effectiveness of the algorithm is assessed with the realistic test model. Compared to the Jacobian-based calculation, our algorithm significantly improves the accuracy of the force control. One step simulation was used to analyze the robustness of the algorithm. In summary, this walking control algorithm generates a push-off force with precision and enables it to reject disturbance rapidly.

The vibratory alignment of the parts in robotic assembly

2017 ◽  
Vol 44 (6) ◽  
pp. 720-729 ◽  
Author(s):  
Bronius Baksys ◽  
Jolanta Baskutiene ◽  
Saulius Baskutis
Keyword(s):  
Design Methodology ◽  
Robotic Assembly ◽  
Mathematical Approach ◽  
Robot Arm ◽  
Content Type ◽  
Pressing Force ◽  
Passive Compliance ◽  
Alignment Process ◽  
Assembly Operations ◽  
Practical Implications

Purpose This paper aims to consider the experimental and theoretical investigation of the vibratory alignment of the peg-hole, when the peg is fixed in the remote centre compliance (RCC) device, and the vibrations are provided either to the hole or to the peg. Design/methodology/approach The experimental analysis of the circular and rectangular peg-hole vibratory alignment using the attached to the robot arm RCC device, under vibratory excitation of the hole, has been performed. The parameters of the vibratory excitation and the part-to-part pressing force influence on the alignment process have been analysed. The mathematical approach of the vibratory alignment using the passive compliance device with the vibrations provided to the peg has been proposed, and the simulation has been carried out. Findings The research has approved the applicability of the RCC device for both of the vibratory alignments of the non-chamfered peg-hole parts either circular or rectangular ones. The compensation of the axial misalignments has been resulted by the directional displacement of the peg supported compliantly. To perform the successful alignment of the parts, it has been necessary to adjust the frequency and the amplitude of the vibrations, the pressing force, the lateral, as well as the angular stiffness of the device. Research limitations/implications The experiments on the vibratory alignment of the rectangular peg-hole parts have been carried out considering only the translational misalignment moved into one direction. The non-impact regime of the vibratory alignment has been analysed. Practical implications The obtained results can be applied in designing the reliable and efficient devices of the vibratory assembly for the alignment of the non-chamfered peg-hole parts, as well as for chamfered ones, if the axial misalignment exceeds the width of the chamfer. The vibratory technique and passive compliance provide possibility to accomplish the assembly operations using the non-expensive low accuracy robots. Originality/value The new method and the mathematical approach of the vibratory assembly using the RCC device can ensure the reliable alignment of the non-chamfered parts, chamfered circular and the rectangular ones, in case the axial misalignment exceeds the assembly clearance, and prevent jamming and wedging.

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