Sensorless Force Control for High-speed Pressurization

2001 ◽  
Vol 13 (3) ◽  
pp. 222-229
Author(s):  
Shigeyasu Kawaji ◽  
◽  
Fuminori Ozaki ◽  
Ryutaro Higashi ◽  
Keyword(s):  
Force Control ◽  
Semiconductor Manufacturing ◽  
Disturbance Observer ◽  
High Speed ◽  
Position Control ◽  
Piecewise Polynomial ◽  
Speed Sensorless ◽  
Model Following ◽  
Ic Testing ◽  
Key Techniques

Force control technology needs a breakthrough to be used for practical purposes because it is rarely used in the industry although it is being improved in academic circles. We propose solving problems of conventional position control in pressurization using high-speed sensorless force control for the IC testing handler used in semiconductor manufacturing. The key techniques to solve the problem are piecewise polynomial trajectory generation to meet needs for high-speed operation, a model-following force servo to achieve pressurizing conditions, and a disturbance observer to estimate pressurization. The effectiveness of the proposed method is confirmed in experiments.

Development of Flexible Inserter for IC Chip Testing

2001 ◽  
Vol 13 (3) ◽  
pp. 289-293
Author(s):  
Toshihiro Taguchi ◽  
Keyword(s):  
Force Control ◽  
Manufacturing Process ◽  
Semiconductor Manufacturing ◽  
Position Control ◽  
Electrical Characteristics ◽  
Pressing Force ◽  
Passive Compliance ◽  
Last Stage ◽  
Ic Testing ◽  
Chip Testing

In the last stage of semiconductor manufacturing process, IC is inserted in the testing equipment for many kinds of electrical characteristics test. But the use of position control causes many problems such as shortage or overdose of pressing force, the non-uniformity of pressing force, and the shoulder touch phenomenon of IC pressing etc. Thus the testing process with stable and flexibly efficient handler is desired. In this paper, focusing on IC packages such as BGA and CSP, the development of flexible inserter for IC testing based on force control and with a new passive compliance unit (PCU) is reported to improve testing throughput drastically.

Application of Robust Control Law for Linear Slider

2008 ◽  
Vol 2 (1) ◽  
pp. 34-42 ◽  
Author(s):  
Satoshi Yamamoto ◽  
◽  
Shinji Wakui
Keyword(s):  
Robust Control ◽  
Disturbance Observer ◽  
High Speed ◽  
Control Law ◽  
Model Matching ◽  
Positioning Accuracy ◽  
Control Laws ◽  
Modified Model ◽  
Applied Model ◽  
Model Following

The most important specifications in precision positioning are positioning accuracy and settling time. When a positioning sensor based on required specifications is installed in equipment, every effort is made to realize throughput, i.e., high-speed positioning. We applied model-matching 2-degree-of-freedom (DOF) control to a linear slider to realize positioning, but found that positioning waveforms were uneven under different conditions. To overcome this problem, we applied robust control laws, e.g., MM-2DOF with a disturbance observer, robust 2DOF control, and modelfollowing 2DOF control to the linear slider. A comparative study confirmed experimentally that robust 2DOF control was most suitable. To improve modelfollowing 2DOF control, we modified model-following 2DOF control and its robust positioning.

Hybrid Position/Force Control of Robot Manipulators Based on Second Derivatives of Position and Force

1996 ◽  
Vol 8 (3) ◽  
pp. 243-251
Author(s):  
Satoshi Komada ◽  
◽  
Muneaki Ishida ◽  
Kouhei Ohnishi ◽  
Takamasa Hori ◽  
...  
Keyword(s):  
Coordinate System ◽  
Force Control ◽  
Disturbance Observer ◽  
Position Control ◽  
Robot Manipulators ◽  
Computational Effort ◽  
Direct Drive ◽  
Second Derivatives ◽  
Parameter Variations ◽  
Derivatives Of

This paper proposes a new robust hybrid position/force control of robot manipulators. The proposed method controls the second derivatives of control variables, such as position and force in a task coordinate system, in order to realize robust and high response control. To this end, the disturbances are estimated by a position-based disturbance observer and a force-based distrubance observer in the task coordinate system, and are compensated by feeding back the estimated distrubances. The proposed method requires less computational effort and is robust against the disturbance and parameter variations. The position-based distrubance observer has been proposed to linearize robot manipulators and has realized robust position control. However, when force control is performed, the force response is influenced by not only the nonlinearity of robot manipulators but also the charactersitics of the environment on which the force is imposed. Therefore, the force-based disturbance observer is developed to realize robust force control. A controller robust against the disturbance and parameter variations is realized by using the position-based disturbance observer and the force-based disturbance observer on performing the position control and the force control respectively. The effectiveness of the proposed method is shown by experiments by using a direct drive robot.

Robust High-Speed Positioning Servo System Based on Disturbance Observer

2009 ◽  
Vol 129 (3) ◽  
pp. 235-242 ◽  
Author(s):  
Masaki Sazawa ◽  
Kiyoshi Ohishi ◽  
Seiichiro Katsura
Keyword(s):  
Disturbance Observer ◽  
High Speed ◽  
Servo System

scholarly journals Neural Network Based Contact Force Control Algorithm for Walking Robots

Sensors ◽  
2021 ◽  
Vol 21 (1) ◽  
pp. 287
Author(s):  
Byeongjin Kim ◽  
Soohyun Kim
Keyword(s):  
Neural Network ◽  
Contact Force ◽  
Force Control ◽  
Control Algorithm ◽  
Position Control ◽  
Linear Quadratic Regulator ◽  
Walking Robots ◽  
Test Model ◽  
Linear Quadratic ◽  
Contact Force Control

Walking algorithms using push-off improve moving efficiency and disturbance rejection performance. However, the algorithm based on classical contact force control requires an exact model or a Force/Torque sensor. This paper proposes a novel contact force control algorithm based on neural networks. The proposed model is adapted to a linear quadratic regulator for position control and balance. The results demonstrate that this neural network-based model can accurately generate force and effectively reduce errors without requiring a sensor. The effectiveness of the algorithm is assessed with the realistic test model. Compared to the Jacobian-based calculation, our algorithm significantly improves the accuracy of the force control. One step simulation was used to analyze the robustness of the algorithm. In summary, this walking control algorithm generates a push-off force with precision and enables it to reject disturbance rapidly.

FPGA-Based Intelligent Software Hardening Chip for Computer Numerical Control System

2011 ◽  
Vol 105-107 ◽  
pp. 2217-2220
Author(s):  
Mu Lan Wang ◽  
Jian Min Zuo ◽  
Kun Liu ◽  
Xing Hua Zhu
Keyword(s):  
High Speed ◽  
High Performance ◽  
Large Scale ◽  
Position Control ◽  
Computer Numerical Control ◽  
Numerical Control ◽  
Cnc Machine Tools ◽  
Cnc Machine ◽  
Cnc System ◽  
Intelligent Software

In order to meet the development demands for high-speed and high-precision of Computer Numerical Control (CNC) machine tools, the equipped CNC systems begin to employ the technical route of software hardening. Making full use of the advanced performance of Large Scale Integrated Circuits (LSIC), this paper puts forward using Field Programmable Gates Array (FPGA) for the functional modules of CNC system, which is called Intelligent Software Hardening Chip (ISHC). The CNC system architecture with high performance is constructed based on the open system thought and ISHCs. The corresponding programs can be designed with Very high speed integrate circuit Hardware Description Language (VHDL) and downloaded into the FPGA. These hardening modules, including the arithmetic module, contour interpolation module, position control module and so on, demonstrate that the proposed schemes are reasonable and feasibility.

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