39.4: A Metal-Based High-Resonant-Frequency Optical Scanner with a Moving-Magnet Actuator for Non-Resonant Large-Angle Scanning

2011 ◽  
Vol 42 (1) ◽  
pp. 547-550
Author(s):  
Nobuaki Takanashi ◽  
Takeshi Honda ◽  
Osamu Ishibashi ◽  
Fujio Okumura
Keyword(s):  
Resonant Frequency ◽  
Large Angle ◽  
Optical Scanner ◽  
Moving Magnet ◽  
High Resonant Frequency

Design of a 6-DOF VCM-Driven Micro Stage

2014 ◽  
Vol 532 ◽  
pp. 3-6 ◽  
Author(s):  
Jae Heon Jeong ◽  
Myeong Hyeon Kim ◽  
Si Woong Woo ◽  
Da Hoon Ahn ◽  
Dong Pyo Hong
Keyword(s):  
Resonant Frequency ◽  
Laser Interferometer ◽  
Voice Coil Motor ◽  
Degree Of Freedom ◽  
Out Of Plane ◽  
Gap Sensors ◽  
Moving Magnet ◽  
High Resonant Frequency

This paper presents design of micro stage performing 6 degree-of-freedom (DOF) motions, which actuated by voice coil motor (VCM). The VCMs generate forces to perform in-plane motions and out-of-plane motions. The stage is supported by springs for compensating mass of the moving part of the stage and the stiffness of the springs has been chosen to meet the moving range requirement and to have high resonant frequency at the same time. Moving magnet type has been selected against moving coil type due to few merits of the type. The size of the stage is 380 X 380 X 60 mm3 and the motions are measured by laser interferometer and gap sensors.

Resonating large-angle and low-consumption micromachined optical scanner

1998 ◽  
Author(s):  
Sam Calmes ◽  
Sandra Schweizer ◽  
Philippe Renaud
Keyword(s):  
Large Angle ◽  
Optical Scanner ◽  
Low Consumption

Monolithically integrated tri-axis shock accelerometers with MHz-level high resonant-frequency

2017 ◽  
Vol 27 (7) ◽  
pp. 075009 ◽  
Author(s):  
Hongshuo Zou ◽  
Jiachou Wang ◽  
Fang Chen ◽  
Haifei Bao ◽  
Ding Jiao ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Monolithically Integrated ◽  
High Resonant Frequency

scholarly journals Piezostack deformable mirror with high technological effectiveness

2021 ◽  
Vol 2103 (1) ◽  
pp. 012190
Author(s):  
V V Toporovsky ◽  
A V Kudryashov ◽  
V V Samarkin ◽  
A A Panich ◽  
A I Sokallo ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Spatial Resolution ◽  
Active Element ◽  
Deformable Mirror ◽  
Deformable Mirrors ◽  
Innovative Design ◽  
Wavefront Aberrations ◽  
Technological Effectiveness ◽  
The Cost ◽  
High Resonant Frequency

Abstract Deformable mirror (DM) is an active element that can change the shape of the surface to compensate for wavefront aberrations. Historically, the development of DMs started from piezostack deformable mirrors (PDM) due to their large stroke, flexibility in actuators geometry, high resonant frequency. However, the cost of PDMs is comparatively high because of their labor-intensive process of manufacturing. In the article innovative design of PDM is presented. The assembling of unconventional PDMs was carried out using piezoceramic combs. This step should allow to decrease number of technological steps, increase spatial resolution of the mirror and thereby reduce the cost of final product.

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