Microcrystalline Silicon Thin Films By PVD For Wide-Area Low-Temperature Polysilicon Production

1999 ◽  
Vol 30 (1) ◽  
pp. 853 ◽  
Author(s):  
Ernest Demaray
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Wide Area ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Low-Temperature Plasma-Processed Microcrystalline Silicon Thin Films for Large-Area Electronics

2001 ◽  
Vol 80-81 ◽  
pp. 361-366 ◽  
Author(s):  
Pere Roca i Cabarrocas ◽  
Surendra Kumar ◽  
V. Tripathi ◽  
P. Bulkin ◽  
R. Brenot ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Low Temperature Plasma ◽  
Microcrystalline Silicon ◽  
Large Area ◽  
Temperature Plasma ◽  
Silicon Thin Films ◽  
Large Area Electronics

Transport in microcrystalline silicon thin films deposited at low temperature by hot-wire chemical vapor deposition

2006 ◽  
Vol 501 (1-2) ◽  
pp. 133-136 ◽  
Author(s):  
Jean-Eric Bourée ◽  
Sandesh R. Jadkar ◽  
Samir Kasouit ◽  
Régis Vanderhaghen
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Hot Wire ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Dynamics of low temperature PECVD growth of microcrystalline silicon thin films: Impact of substrate surface treatments

2006 ◽  
Vol 352 (9-20) ◽  
pp. 906-910 ◽  
Author(s):  
M. Losurdo ◽  
M.M. Giangregorio ◽  
A. Sacchetti ◽  
P. Capezzuto ◽  
G. Bruno ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Substrate Surface ◽  
Surface Treatments ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films
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