Characterization of Low Temperature P-Type Hydrogenated Microcrystalline Silicon Thin Films Deposited by Plasma Enhanced Chemical Vapor Deposition

2007 ◽  
Author(s):  
W. F. L. Tse ◽  
I. Khodami ◽  
M. M. Adachi ◽  
X. Wang ◽  
K. Kavanagh ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films ◽  
P Type

Transport in microcrystalline silicon thin films deposited at low temperature by hot-wire chemical vapor deposition

2006 ◽  
Vol 501 (1-2) ◽  
pp. 133-136 ◽  
Author(s):  
Jean-Eric Bourée ◽  
Sandesh R. Jadkar ◽  
Samir Kasouit ◽  
Régis Vanderhaghen
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Hot Wire ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films
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