P-1: Dependence of Poly-Si TFT Characteristics on Oxide Interface Traps and Grain Boundary Traps and its Application to Diagnosis of Fabrication Processes

2004 ◽  
Vol 35 (1) ◽  
pp. 220 ◽  
Author(s):  
Mutsumi Kimura ◽  
Daisuke Abe ◽  
Satoshi Inoue ◽  
Tatsuya Shimoda
2021 ◽  
pp. 2100074
Author(s):  
Livia Janice Widiapradja ◽  
Taewook Nam ◽  
Yeonsu Jeong ◽  
Hye‐Jin Jin ◽  
Yangjin Lee ◽  
...  

2001 ◽  
Vol 4 (6) ◽  
pp. G47 ◽  
Author(s):  
Kow Ming Chang ◽  
Yuan Hung Chung ◽  
Tzyk Cheang Lee ◽  
Yong Long Sun

1996 ◽  
Vol 43 (7) ◽  
pp. 1144-1152 ◽  
Author(s):  
H.-H. Vuong ◽  
C.S. Rafferty ◽  
S.A. Eshraghi ◽  
J.L. Lentz ◽  
P.M. Zeitzoff ◽  
...  

2016 ◽  
Vol 149 ◽  
pp. 113-116 ◽  
Author(s):  
Hyeongwan Oh ◽  
Jungsik Kim ◽  
Junyoung Lee ◽  
Taiuk Rim ◽  
Chang-Ki Baek ◽  
...  

2002 ◽  
Vol 751 ◽  
Author(s):  
A. Ziegler ◽  
C. Kisielowski ◽  
M. J. Hoffmann ◽  
R. O. Ritchie

ABSTRACTThe microstructural evolution and structural characteristics and transitions in the thin grain-boundary oxide films in a silicon nitride ceramic, specifically between two adjacent grains and not the triple junctions, are investigated to find their effect on the macroscopic fracture properties. It is found that by heat treating a model Si3N4-2wt% Y2O3 ceramic for ∼200 hr at 1400°C in air, the fracture toughness can be increased by ∼100%, coincident with a change in fracture mechanism from transgranular to intergranular. Structural phase transformations occur in the thin grain boundaries during oxidation that are revealed by XRD, EDX, Raman and EELS analyses. They affect the local bonding of atoms. It is concluded that only specific crystal “building blocks”, i.e., tetrahedra, are transformed along the grain boundary and the resulting difference in the atomic structure of the oxide interface is seen directly to alter the macroscopic fracture behavior.


1994 ◽  
Vol 364 ◽  
Author(s):  
Eckart Schumann ◽  
J. C. Yang ◽  
M. Rühle ◽  
M. J. Graham

AbstractThe effect of Y and Zr on the oxidation behaviour of NiAl has been investigated using high resolution SIMS and analytical TEM. 18O tracer experiments in conjunction with SIMS showed that Y and Zr reduce the outward transport of cations during the growth of the AI2O3 scale. Complementary STEM-EDS measurements revealed segregation of Y and Zr at the metal/oxide interface as well as the grain boundaries in the AI2O3 scale. The amounts of segregation at both the interface and grain boundary were calculated to be less than one monolayer.


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