Fabrication of Optical Modulator Based on Proton Exchange

<p>For the investigation of optical modulator, the optical wave-guide was fabricated on x-cut LiNbO₃ substrate using proton exchange method with self-aligned electrode. The electrode pattern was designed using a self-aligned thin film electrode method. After proton exchange process, the wave-guide could be prepared by annealing process to control the width and depth of the optical wave-guide. The initial crossover state of the fabricated 1´2 optical switch was observed with controlling the annealing process variables and the structure of self-aligned thin film electrodes. As the results in the present work, the measured cross talk and minimum detectable switching voltage were obtained at the values of -29.5dB and 8.0V, respectively, with good merits.</p>