scholarly journals Fault Detection Considerations in Silicon Based MEMS Resonators by Observing Changes in Dynamic Behaviour

2014 ◽  
Vol 2 (1) ◽  
Author(s):  
S. Ikizoğlu ◽  
M. Akyol
Keyword(s):  
Fault Detection ◽  
Dynamic Behaviour ◽  
Mems Resonators ◽  
Silicon Based

Proton-Induced Displacement Damage and Total-Ionizing-Dose Effects on Silicon-Based MEMS Resonators

2018 ◽  
Vol 65 (1) ◽  
pp. 34-38 ◽  
Author(s):  
Huiqi Gong ◽  
Wenjun Liao ◽  
En Xia Zhang ◽  
Andrew L. Sternberg ◽  
Michael W. McCurdy ◽  
...  
Keyword(s):  
Total Ionizing Dose ◽  
Displacement Damage ◽  
Mems Resonators ◽  
Dose Effects ◽  
Silicon Based ◽  
Total Ionizing Dose Effects

Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators

2007 ◽  
Vol 136 (1) ◽  
pp. 125-131 ◽  
Author(s):  
Bongsang Kim ◽  
Rob N. Candler ◽  
Matthew A. Hopcroft ◽  
Manu Agarwal ◽  
Woo-Tae Park ◽  
...  
Keyword(s):  
Frequency Stability ◽  
Wafer Scale ◽  
Mems Resonators ◽  
Silicon Based

Fault Detection and Dynamic Behaviour of Pneumatic Valves

1994 ◽  
Vol 27 (5) ◽  
pp. 441-446
Author(s):  
G. Belforte ◽  
M. Velardocchia
Keyword(s):  
Fault Detection ◽  
Dynamic Behaviour ◽  
Pneumatic Valves
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