Importance of Si surface flatness to realize high-performance Si devices utilizing ultrathin films with new material system
2014 ◽
Vol 11
(14)
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pp. 20142006-20142006
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Keyword(s):
1993 ◽
Vol 51
◽
pp. 236-237
Keyword(s):
Keyword(s):
Keyword(s):
2011 ◽
Vol 1
(3)
◽
pp. 31-52
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2011 ◽
Vol 287-290
◽
pp. 858-861
Keyword(s):
2008 ◽
Vol 32
(9)
◽
pp. 699-703
2015 ◽
Vol 2015
(1)
◽
pp. 000273-000277