scholarly journals Synthesis of Aligned Single-Walled Carbon Nanotubes by Point-Arc Microwave Plasma Chemical Vapor Deposition

2005 ◽  
Vol 81 (9) ◽  
pp. 665-668
Author(s):  
Takayuki IWASAKI ◽  
Goufang ZHONG ◽  
Iwao OHDOMARI ◽  
Hiroshi KAWARADA
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Single Walled Carbon Nanotubes ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Single Walled Carbon ◽  
Walled Carbon Nanotubes

Growth of Single-Walled Carbon Nanotubes by Microwave Plasma Enhanced Chemical Vapor Deposition

2004 ◽  
Vol 858 ◽  
Author(s):  
Matthew R. Maschmann ◽  
Amit Goyal ◽  
Zafar Iqbal ◽  
Timothy S. Fisher ◽  
Roy Gat
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Single Walled Carbon Nanotubes ◽  
Force Microscopy ◽  
Single Walled Carbon ◽  
Atomic Force ◽  
Walled Carbon Nanotubes

ABSTRACTSingle-walled carbon nanotubes (SWCNTs) have been grown for the first time by microwave plasma-enhanced chemical vapor deposition (PECVD) at 800°C using methane as the precursor and bimetallic Mo/Co catalyst supported on MgO dispersed on a silicon wafer. The nanotubes grown consist of bundles, each composed of individual tubes of a single diameter associated with either metallic or semiconducting SWCNTs, based on characterization by Raman spectroscopy. Field-emission scanning electron microscopy and atomic force microscopy show that the bundles are relatively thin – 5 to 10 nm in diameter – and up to a few micrometers in length. The results are compared with those obtained on recently reported SWCNTs grown by radio frequency PECVD.

Effect of DC Bias on Microwave Plasma Enhanced Chemical Vapor Deposition Synthesis of Single-Walled Carbon Nanotubes

2005 ◽  
Author(s):  
Matthew R. Maschmann ◽  
Placidus B. Amama ◽  
Timothy S. Fisher
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Single Walled Carbon Nanotubes ◽  
Diameter Distribution ◽  
Single Walled Carbon ◽  
Dc Bias ◽  
Walled Carbon Nanotubes

The physical properties of carbon nanotubes (CNTs) make them outstanding candidates for introduction into technologies ranging from high resolution flat panel displays to nanoscale transistors. Integration of carbon nanotubes into devices, however, requires precise control over the manufacturing processes used during their synthesis. To meet the specific requirements of a given application, alignment, diameter, length and chirality of carbon nanotubes must be strictly addressed. This work demonstrates the controlled synthesis of single-walled carbon nanotubes (SWCNTs) with low amount of undesired carbonaceous species using plasma enhanced chemical vapor deposition (PECVD). This report elucidates the role of DC bias applied to the growth substrate during synthesis, including the field-enhanced alignment of SWCNTs, selectivity in the diameter distribution and selectivity of semiconducting versus metallic nanotubes. Carbon nanotubes are characterized using Raman spectroscopy and electron microscopy.

Growth of Single-Walled Carbon Nanotubes from Ceramic Particles by Alcohol Chemical Vapor Deposition

2008 ◽  
Vol 1 (1) ◽  
pp. 014001 ◽  
Author(s):  
Huaping Liu ◽  
Daisuke Takagi ◽  
Hiroshi Ohno ◽  
Shohei Chiashi ◽  
Tomohito Chokan ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Single Walled Carbon Nanotubes ◽  
Ceramic Particles ◽  
Single Walled Carbon ◽  
Walled Carbon Nanotubes
Sign in / Sign up

Export Citation Format

Share Document