Numerical Simulation and Technology Computer-Aided Design of Plasma Processing for the Fabrication of Semiconductor Microelectronic Devices
2004 ◽
Vol 80
(11)
◽
pp. 909-918
◽
Keyword(s):
Keyword(s):
2016 ◽
Vol 14
(2)
◽
pp. 147
◽
2020 ◽
1988 ◽
Vol 135
(1)
◽
pp. 60
1987 ◽
Vol 134
(4)
◽
pp. 386
◽
1972 ◽
Vol 119
(1)
◽
pp. 17
1988 ◽
Vol 49
(C8)
◽
pp. C8-679-C8-680
◽
Keyword(s):