Optical Properties of Amorphous Silicon-Yttrium Films
Keyword(s):
AbstractThis paper presents and discusses the results of measuring IR reflection and ellipsometric parameters, optical microscopy and AFM the mixed phase of amorphous Si:Y films with microcrystalline inclusions. These films were obtained by electron-beam evaporation of siliconyttrium alloys with different Y concentration (5-30 %) at two substrate temperatures (370 and 620 °C).
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Keyword(s):
Hydrogen dissociation and incorporation into amorphous silicon produced by electron beam evaporation
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