Electroactive Polymer Based Micro-ElectroMechanical System as Biosensor Platform

2004 ◽  
Vol 855 ◽  
Author(s):  
Zhimin Li ◽  
Suiqiong Li ◽  
Z.-Y. Cheng
Keyword(s):  
Liquid Medium ◽  
Electromechanical System ◽  
Electroactive Polymer ◽  
Q Value ◽  
Damping Effect ◽  
Merit Factor ◽  
Sensor Platform ◽  
Resonance Frequencies ◽  
Micro Sensor ◽  
Micro Electromechanical System

ABSTRACTA micro-electromechanical diaphragm (MEMD) as micro-sensor platform is introduced. The performance of a MEMD is compared with that of a microcantilever (MC). It is theoretically found that the sensitivity of a MEMD is about 50 times higher than that of a MC. The measured resonance frequencies in air proved the validity of the MEMD design. More importantly, the quality merit factor (Q value) of MEMD is higher than that of MC. The damping effect of liquid medium on a MEMD is much smaller than on a MC. It is experimentally demonstrated that the MEMD works well in both air and liquid.

Magnetostrictive Microcantilever as Micro-Biosensor Platform

2004 ◽  
Vol 855 ◽  
Author(s):  
Suiqiong Li ◽  
Zhimin Li ◽  
Lisa Orona ◽  
Z.-Y. Cheng
Keyword(s):  
Theoretical Calculation ◽  
High Performance ◽  
The State ◽  
Yeast Cells ◽  
Q Value ◽  
Resonance Behavior ◽  
Merit Factor ◽  
Sensor Platform ◽  
State Of Art

ABSTRACTIn this paper, a novel micro-biosensor platform - magnetostrictive microcantilever (MSMC) - is reported. The resonance behavior and the sensitivity of MSMC as sensor platform were characterized and compared to the theoretical calculation. The detection of yeast cells using the biosensor made of MSMC was reported. The results demonstrate the feasibility of MSMC as a high performance biosensor platform. Compare to current microcantilevers, which is widely considered as the state-of-art sensor platform, the MSMCs have following advantages: 1) remote/wireless driving and sensing; 2) easy to fabricate. More importantly, it is experimentally found that the quality merit factor (Q value) of MSMC can reach more than 250, which is much higher than other cantilevers.

A fractal micro-electromechanical system and its pull-in stability

2021 ◽  
pp. 146134842098404
Author(s):  
Dan Tian ◽  
Chun-Hui He
Keyword(s):  
Fractal Model ◽  
Electromechanical System ◽  
Normal Operation ◽  
Fractal Derivative ◽  
Operation Period ◽  
Micro Electromechanical System

Pull-in instability occurs in a micro-electromechanical system, and it greatly hinders its normal operation. A fractal modification is suggested to make the system stable in all operation period. A fractal model is established using a fractal derivative, and the results show that by suitable fabrication of the micro-electromechanical system device, the pull-in instability can be converted into a novel state of pull-in stability.

Fabrication of a Micro-Electromechanical System-Based Acetone Gas Sensor Using CeO2 Nanodot-Decorated WO3 Nanowires

2020 ◽  
Vol 12 (12) ◽  
pp. 14095-14104 ◽  
Author(s):  
Kaiping Yuan ◽  
Cheng-Yu Wang ◽  
Li-Yuan Zhu ◽  
Qi Cao ◽  
Jia-He Yang ◽  
...  
Keyword(s):  
Gas Sensor ◽  
Electromechanical System ◽  
Micro Electromechanical System

A bionic micro-electromechanical system piezo-resistive vector hydrophone that suppresses vibration noise

2019 ◽  
Vol 29 (11) ◽  
pp. 115007
Author(s):  
Jinlong Song ◽  
Renxin Wang ◽  
Guojun Zhang ◽  
Zhenzhen Shang ◽  
Lansheng Zhang ◽  
...  
Keyword(s):  
Electromechanical System ◽  
Vector Hydrophone ◽  
Micro Electromechanical System ◽  
Vibration Noise

Design and TEM Simulation of a MEMS Based Microcantilever Cardiac Marker Sensor

2009 ◽  
Vol 1 (1) ◽  
Author(s):  
Sree Vidhya ◽  
Gideon Praveen Kumar ◽  
Lazar Mathew
Keyword(s):  
System Design ◽  
Dna Hybridization ◽  
Electromechanical System ◽  
Antigen Binding ◽  
Cardiac Marker ◽  
Important Principle ◽  
Micro Electromechanical System ◽  
Geometric Variation ◽  
Proportional Decrease ◽  
Simulation Package

Piezoresistive actuation of a microcantilever induced by biomolecular binding such as DNA hybridization and antibody-antigen binding is an important principle useful in biosensing applications. As the magnitude of the forces exerted is small, increasing the sensitivity of the microcantilever becomes critical. In this paper, we are considering to achieve this by geometric variation in the cantilever. The sensitivity of the cantilever was improved so that the device can sense the presence of antigen even if the magnitude of surface-stresses over the microcantilever was very small. We consider a “T-shaped” cantilever that eliminates the disadvantages while improving the sensitivity simultaneously. Simulations for validation have been performed using INTELLISUITE software (a micro-electromechanical system design and simulation package). The simulations reveal that the T-shaped microcantilever is almost as sensitive as a thin cantilever and has relatively very low buckling effect. Simulations also reveal that with an increase in thickness of the cantilever, there is a proportional decrease in the sensitivity.

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