Local electromechanical properties of ferroelectric materials for piezoelectric applications

2004 ◽  
Vol 838 ◽  
Author(s):  
A. L. Kholkin ◽  
I. K. Bdikin ◽  
V. V. Shvartsman ◽  
A. Orlova ◽  
D. Kiselev ◽  
...  
Keyword(s):  
Domain Wall ◽  
Microelectromechanical Systems ◽  
Ferroelectric Materials ◽  
Electromechanical Properties ◽  
Force Microscopy ◽  
Control Electronics ◽  
Piezoelectric Force Microscopy ◽  
And Control ◽  
Electromechanical Characterization

ABSTRACTLocal electromechanical characterization is becoming prerequisite for the development of ferroelectric-based piezoelectric devices including multilayer actuators, micromotors, piezoelectric filters and, especially, microelectromechanical systems (MEMS), which combine piezoelectric elements and control electronics on the same chip. In this work, we present the results of local electromechanical characterization of several important ferroelectric materials including Pb(Zr, Ti)O3 (PZT) and (Pb, La)(Zr, Ti)O3 (PLZT) in both thin film and ceramic form. Local piezoelectric hysteresis measurements are performed by the piezoelectric force microscopy (PFM) that detects small electric field-induced deformation on the nanoscale e. g., within the single grain of a polycrystalline material. A number of novel phenomena is observed with increasing dc bias voltage including the jump of ferroelectric domain wall to the grain boundary, the “fingerlike” instability of domain wall, and the local phase transition into ferroelectric phase.

Ferroelectric Thin Films in Micro-electromechanical Systems Applications

MRS Bulletin ◽  
1996 ◽  
Vol 21 (7) ◽  
pp. 59-65 ◽  
Author(s):  
D.L. Polla ◽  
L.F. Francis
Keyword(s):  
Thin Films ◽  
Integrated Circuit ◽  
Microelectromechanical Systems ◽  
Pressure Sensors ◽  
Ferroelectric Ceramic ◽  
Consumer Electronics ◽  
Ferroelectric Ceramics ◽  
Control Electronics ◽  
Commercial Applications ◽  
And Control

Ferroelectric ceramic thin films fit naturally into the burgeoning field of microelectromechanical systems (MEMS). Microelectromechanical systems combine traditional Si integrated-circuit (IC) electronics with micromechanical sensing and actuating components. The term MEMS has become synonymous with many types of microfabricated devices such as accelerometers, infrared detectors, flow meters, pumps, motors, and mechanical components. These devices have lateral dimensions in the range of 10 μm–10 mm. The ultimate goal of MEMS is a self-contained system of interrelated sensing and actuating devices together with signal processing and control electronics on a common substrate, most often Si. Since fabrication involves methods common to the IC industry, MEMS can be mass-produced. Commercial applications for MEMS already span biomedical (e.g., blood-pressure sensors), manufacturing (e.g., microflow controllers), information processing (e.g., displays), and automotive (e.g., accelerometers) industries. More applications are projected in consumer electronics, manufacturing control, communications, and aerospace. Materials for MEMS include traditional microelectronic materials (e.g., Si, SiO2, Si3N4, polyimide, Pt, Al) as well as nontraditional ones (e.g., ferroelectric ceramics, shapememory alloys, chemical-sensing materials). The superior piezoelectric and pyroelectric properties of ferroelectric ceramics make them ideal materials for microactuators and microsensors.

Accurate Electromechanical Characterization of Soft Molecular Monolayers using Piezo Force Microscopy

2019 ◽  
Author(s):  
Nathaniel Miller ◽  
Haley Grimm ◽  
Seth Horne ◽  
Geoffrey Hutchison
Keyword(s):  
Lead Zirconate Titanate ◽  
Mechanical Response ◽  
Differential Capacitance ◽  
Inorganic Materials ◽  
Organic Monolayers ◽  
Force Microscopy ◽  
Electrostatic Component ◽  
Piezo Force Microscopy ◽  
Electromechanical Characterization

We report a new methodology for the electromechanical characterization of organic monolayers based on the implementation of dual AC resonance tracking piezo force microscopy (DART-PFM) combined with a sweep of an applied DC field under a fixed AC field. This experimental design allows calibration of the electrostatic component of the tip response and enables the use of low spring constant levers in the measurement. Moreover, the technique is shown to determine both positive and negative piezo response. The successful decoupling of the electrostatic component from the mechanical response will enable more quantitative electromechanical characterization of molecular and biomaterials and should generate new design principles for soft bio-compatible piezoactive materials. To highlight the applicability, our new methodology was used to successfully characterize the piezoelectric coefficient (d<sub>33</sub>) of a variety of piezoactive materials, including self-assembled monolayers made of small molecules (dodecane thiol, mercaptoundecanoic acid) or macromolecules (peptides, peptoids), as well as a variety of inorganic materials, including lead zirconate titanate [PZT], quartz, and periodically poled lithium niobate [PPLN]. Due to high differential capacitance, the soft organic monolayers demonstrated exceedingly large electromechanical response (as high as 250 pm/V) but smaller d<sub>33</sub>piezocoefficients. Finally, we find that the capacitive electrostatic response of the organic monolayers studied are significantly larger than conventional inorganic piezoelectric materials (e.g., PZT, PPLN, quartz), suggesting organic electromechanical materials applications can successfully draw from both piezo and electrostatic responses.

A Piezothermoelastic Thin Shell Theory Applied to Active Structures

1994 ◽  
Vol 116 (3) ◽  
pp. 295-302 ◽  
Author(s):  
H. S. Tzou ◽  
R. V. Howard
Keyword(s):  
High Performance ◽  
Shell Theory ◽  
Piezoelectric Materials ◽  
Electromechanical Properties ◽  
Mechanical Loads ◽  
Active Structures ◽  
Control Electronics ◽  
Principal Directions ◽  
And Control ◽  
Thin Shell Theory

“Smart” structures with integrated sensors, actuators, and control electronics are of importance to the next-generation high-performance structural systems. Piezoelectric materials possess unique electromechanical properties, the direct and converse effects, which, respectively, can be used in sensor and actuator applications. In this study, piezothermoelastic characteristics of piezoelectric shell continua are studied and applications of the theory to active structures in sensing and control are discussed. A generic piezothermoelastic shell theory for thin piezoelectric shells is derived, using the linear piezoelectric theory and Kirchhoff-Love assumptions. It shows that the piezothermoelastic equations, in three principal directions, include thermal induced loads, as well as conventional electric and mechanical loads. The electric membrane forces and moments induced by the converse effect can be used to control the thermal and mechanical loads. A simplification procedure, based on the Lame´ parameters and radii of curvatures, is proposed and applications of the theory to (1) a piezoelectric cylindrical shell, (2) a piezoelectric ring, and (3) a piezoelectric beam are demonstrated.

scholarly journals Synthesis and Characterization of a Monoclinic Crystalline Phase of Hydroxyapatite by Synchrotron X-ray Powder Diffraction and Piezoresponse Force Microscopy

Crystals ◽  
2018 ◽  
Vol 8 (12) ◽  
pp. 458 ◽  
Author(s):  
Ricardo Pérez-Solis ◽  
José Gervacio-Arciniega ◽  
Boby Joseph ◽  
María Mendoza ◽  
Abel Moreno
Keyword(s):  
Room Temperature ◽  
Monoclinic Phase ◽  
Sol Gel ◽  
Ultrasound Irradiation ◽  
Piezoresponse Force Microscopy ◽  
Medical Rehabilitation ◽  
X Ray ◽  
Force Microscopy ◽  
Piezoelectric Force Microscopy

In this work, we report the synthesis of a monoclinic hydroxyapatite [Ca10(PO4)6(OH)2] (hereafter called HA) prepared by the sol-gel method assisted by ultrasound radiation at room temperature. The characterization of both the monoclinic and the hexagonal phases were performed by powder X-ray diffraction (PXRD) and using synchrotron radiation (SR). The measurement of the piezoelectricity was performed by piezoresponse force microscopy (PFM). The synthesis produced a mixture of monoclinic and hexagonal hydroxyapatite (HA). We also discuss the importance of stabilizing the monoclinic phase at room temperature with ultrasound irradiation. The existence of the monoclinic phase has important advantages in terms of showing piezoelectric properties for applications in the new medical rehabilitation therapies. Rietveld refinement of the PXRD data from SR indicated the monoclinic phase to be of about 81%. Finally, piezoelectric force microscopy was used to distinguish the phases of hydroxyapatite by measuring the average piezoelectric coefficient deff = 10.8 pm/V.

scholarly journals AFM Nanotribomechanical Characterization of Thin Films for MEMS Applications

Micromachines ◽  
2021 ◽  
Vol 13 (1) ◽  
pp. 23
Author(s):  
Corina Bîrleanu ◽  
Marius Pustan ◽  
Florina Șerdean ◽  
Violeta Merie
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Microelectromechanical Systems ◽  
Mems Devices ◽  
Force Microscopy ◽  
Atomic Force ◽  
Fundamental Understanding ◽  
Quantitative Analyses ◽  
Efficiency And Reliability

Nanotribological studies of thin films are needed to develop a fundamental understanding of the phenomena that occur to the interface surfaces that come in contact at the micro and nanoscale and to study the interfacial phenomena that occur in microelectromechanical systems (MEMS/NEMS) and other applications. Atomic force microscopy (AFM) has been shown to be an instrument capable of investigating the nanomechanical behavior of many surfaces, including thin films. The measurements of tribo-mechanical behavior for MEMS materials are essential when it comes to designing and evaluating MEMS devices. A great deal of research has been conducted to evaluate the efficiency and reliability of different measurements methods for mechanical properties of MEMS material; nevertheless, the technologies regarding manufacturing and testing MEMS materials are not fully developed. The objectivesof this study are to focus on the review of the mechanical and tribological advantages of thin film and to highlight the experimental results of some thin films to obtain quantitative analyses, the elastic/plastic response and the nanotribological behavior. The slight fluctuation of the results for common thin-film materials is most likely due to the lack of international standardization for MEMS materials and for the methods used to measure their properties.

scholarly journals Effect of the intrinsic width on the piezoelectric force microscopy of a single ferroelectric domain wall

2008 ◽  
Vol 103 (12) ◽  
pp. 124110 ◽  
Author(s):  
Anna N. Morozovska ◽  
Eugene A. Eliseev ◽  
George S. Svechnikov ◽  
Venkatraman Gopalan ◽  
Sergei V. Kalinin
Keyword(s):  
Domain Wall ◽  
Ferroelectric Domain ◽  
Force Microscopy ◽  
Piezoelectric Force Microscopy

Polarization Screening and Image Formation in SSPM, EFM and Piezoresponse Imaging of Ferroelectric BaTiO3 (100) Surface

2000 ◽  
Vol 6 (S2) ◽  
pp. 706-707
Author(s):  
Sergei V. Kalinin ◽  
Dawn A. Bonnell
Keyword(s):  
Electrostatic Force ◽  
Ferroelectric Materials ◽  
Scanning Probe ◽  
Microwave Ceramics ◽  
Force Microscopy ◽  
Resonant Frequency Shift ◽  
Significant Interest ◽  
Ferroelectric Surfaces ◽  
Scanning Surface Potential Microscopy

Possible applications of ferroelectric materials in non-volatile memories, MEMS, microwave ceramics, PTCR devices and sensors draw significant interest to these materials. Operation of most of these devices relies heavily on the surface (FRAM and other thin-film devices) and interface (PTCR, varistors) properties of ferroeiectrics, particularly on the polarization and charge distribution in the surface or interface region. Electrostatic scanning probe techniques such as electrostatic force microscopy (EFM), scanning surface potential microscopy (SSPM) and piezoresponse imaging (PRI) can be successfully employed for the characterization of ferroelectric surfaces on the micron and submicron level. The former technique is based on the detection of the resonant frequency shift of mechanically driven cantilever, which is proportional to gradient of electrostatic force acting on the tip. The latter two techniques are based on the voltage modulation approach, i.e. during imaging the piezoelectric actuator driving the cantilever is disengaged and the AC bias is applied directly to conductive tip.

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