Near-infrared Ge Photodetectors Fabricated on Si Substrates with CMOS Technology
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AbstractWe have fabricated the first CMOS process compatible high-responsivity Ge p-i-n diodes for 1.55 μm wavelengths. The thermal expansion mismatch between Ge epilayers and Si substrates was used to engineer tensile strain upon cooling from the growth temperature. This 0.2% tensile strain results in a lowering of the direct transition energy in Ge by 30 meV and extends the responsivity curve to near 1.6μm.
2011 ◽
Vol 470
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pp. 146-151
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1991 ◽
Vol 49
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pp. 962-963
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2013 ◽
Vol 5
(3)
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pp. 1165-1173
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